GaAs microcrystal growth on semiconductor surfaces by low energy focused ion beam

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 4, 1998, Pages 2538-2542

  Chikyow, Toyohiro ^a   Koguchi, Nobuyuki ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0005979821     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590205     Document Type: Article

References (13)

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