Laser Microchemical Technology: NewTools for Flip-Chip Debug and Failure Analysis

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Volumn 1997-October, Issue , 1997, Pages 211-213

  Silverman, Scott ^a   Aucoin, R ^a   Mallatt, J ^a   Ehriich, D ^a  

^a Revise Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; FLIP CHIP DEVICES; IONS; MEMS; SURFACE ROUGHNESS;

DEBUG TOOLS; FLIP CHIP; FOCUSED IONS BEAMS; KEY ISSUES; LASER ETCHING; LASER MICROCHEMICAL; LOCALIZED THINNING; MICROCHEMICAL TECHNOLOGIES; OPTIMISATIONS; TOOLSETS;

FOCUSED ION BEAMS;

EID: 0005973009     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.31399/asm.cp.istfa1997p0211     Document Type: Conference Paper

References (4)

1. Laser Microfabrication: Thin Film Processes and Lithography, D'J, Ehrlich and 1.Y. Tsao, eds., (Academic Press, Boston, 1989).
2. D. I. Ehrlich, J. Y. Tsao, D.J. Silversmith, J.H.C. Sedlacek, RW. Mountain and W. Graber, Electron Dev. Lett. EDL-5, 32 (1984).
3. N. Nassuphis, R W, Mathews, S.T. PaImacci, and D. J. Ehrlich, J. Vac. Sci. Technol. B-12, 1 (1994).
4. T.M. Bloomstein and D. I. Ehrlich Appl. Phys. Lett. 61, 708, (1992).