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Volumn 9, Issue 6, 1991, Pages 3090-3099

Control of ion energy and flux in a dual radio frequency excitation magnetron sputtering discharge

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0005948649     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.577178     Document Type: Article
Times cited : (32)

References (38)
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    • T. Ohmi, H. Kuwabara, T. Shibata, and T. Kiyota, in ULSI Science and Technology, edited by S. Broydo and C. M. Osbum, (The Electrochemical Society, Pennington, NJ, 1987), p. 574.
    • (1987) ULSI Science and Technology , pp. 574
    • Ohmi, T.1    Kuwabara, H.2    Shibata, T.3    Kiyota, T.4
  • 19
    • 26544459755 scopus 로고
    • edited by V. Akins, (The Electrochemical Society, Pennington, NJ
    • T. Ohmi, in Automated Integrated Circuits Manufacturing 1989, edited by V. Akins, (The Electrochemical Society, Pennington, NJ, 1990), p. 3.
    • (1990) Automated Integrated Circuits Manufacturing 1989 , pp. 3
    • Ohmi, T.1
  • 24
    • 84957226516 scopus 로고
    • edited by R. H. Huddlestone and S. L. Leonard, 1st ed. (Academic, New York
    • F. F. Chen, in Plasma Diagnostic Techniques, edited by R. H. Huddlestone and S. L. Leonard, 1st ed. (Academic, New York, 1965), pp. 163-191.
    • (1965) Plasma Diagnostic Techniques , pp. 163-191
    • Chen, F.F.1
  • 25
  • 26
    • 5644231639 scopus 로고
    • Institute for Aerospace Studies
    • Report, University of Toronto, Canada
    • J. G. Laframboise, Institute for Aerospace Studies, Report No. 100, University of Toronto, Canada, 1966.
    • (1966) , vol.100
    • Laframboise, J.G.1
  • 29
    • 84957232551 scopus 로고
    • Utrecht, Netherlands
    • A. D. Kuijpers, Ph.D. thesis, Utrecht, Netherlands, 1989, p. 12.
    • (1989) Ph.D. thesis , pp. 12
    • Kuijpers, A.D.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.