Experimental study of field emission properties of the Spindt-type field emitter

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 13, Issue 2, 1995, Pages 487-490

  Itoh, Shigeo ^a   Watanabe, Teruo ^a   Ohtsu, Kazuyoshi ^a   Taniguchi, Masateru ^a   Uzawa, Satoshi ^a   Nishimura, Norio ^a  

^a Futaba Corporation   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANODES; COMPUTER SIMULATION; CURRENT DENSITY; ELECTRON BEAMS; FIELD EMISSION CATHODES; FINITE ELEMENT METHOD; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON; VACUUM TECHNOLOGY;

FLAT PANEL DISPLAYS; GATE HOLE DIAMETER; SIMULATED ELECTRON BEAM SPREAD; SPINDT-TYPE EMITTER ARRAYS; SPINDT-TYPE FIELD EMITTER;

DISPLAY DEVICES;

EID: 0005908306     PISSN: 0734211X     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588339     Document Type: Article

References (10)