Limitations to the plasma energy and density in electron cyclotron resonance ion sources

Physics of Plasmas

Volumn 6, Issue 8, 1999, Pages 3408-3415

  Perret, C ^a   Girard, A ^a   Khodja, H ^a   Melin, G ^a  

^a CEA GRENOBLE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0005903071     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.873581     Document Type: Article

References (17)

1. N. J. Fisch, Rev. Mod. Phys. 59, 175 (1987).
2. M. A. Liebermann, and A. J. Lichtenberg, Principles of Plasma Discharges and Material Processing (Wiley Interscience, New York, 1994).
3. R. Geller, Electron Cyclotron resonance Ion Sources and ECR Plasmas (Institute of Physics Bristol and Philadelphia, 1996).
4. B. Jacquot and M. Pontonnier, Nucl. Instrum. Methods Phys. Res. A 287, 341 (1990).
5. P. Ludwig, F. Bourg, P. Briand et al. Rev. Sci. Instrum. 69, 4082 (1998).
6. C. Barué, M. Lamoureux, P. Briand, A. Girard, and G. Melin, J. Appl. Phys. 76, 2662 (1994).
7. M. E. Mauel, Phys. Fluids 27, 2899 (1984).
8. C. C. Petty, D. L. Goodman, D. L. Smatlak, and D. K. Smith, Phys. Fluids B 3, 705 (1991).
9. A. Girard, Rev. Sci. Instrum. 63, 2676 (1992).
10. J. B. Taylor, Phys. Fluids 6, 1529 (1962).
11. D. L. Goodman, J. P. Freidberg, and B. Lane, Phys. Fluids 29, 3365 (1986).
12. A. Girard, P. Briand, G. Gaudart, J. P. Klein, F. Bourg, J. Debernardi, J. M. Mathonnet, G. Melin, and Y. Su, Rev. Sci. Instrum. 65, 1714 (1994).
13. A. Girard, C. Perret, G. Melin, and C. Lécot. Rev. Sci. Instrum. 69, 1100 (1998).
14. M. Lamoureux, A. Girard, R. Pras, P. Charles, H. Khodja, F. Bourg, J. P. Briand, and G. Melin, Phys. Plasmas 3, 4307 (1996).
15. C. Barué, P. Briand, A. Girard, G. Melin, and G. Briffod, Rev. Sci. Instrum. 63, 2844 (1992).
16. C. F. Kennel and F. Engelmann, Phys. Fluids 9, 2377 (1966).
17. T. H. Stix, Waves in Plasmas (American Institute of Physics, New York, 1992).