Low-cost PDMS seal ring for single-side wet etching of MEMS structures

Sensors and Actuators, A: Physical

Volumn 70, Issue 1-2, 1998, Pages 191-194

  Brugger, J ^a   Beljakovic, G ^a,b   Despont, M ^a   Biebuyck, H ^a   De Rooij, N F ^b   Vettiger, P ^a  

^a IBM RESEARCH ZURICH   (Switzerland)

^b UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

Poly(dimethylsiloxane) (PDMS); Seal ring; Wet etching

Indexed keywords

EID: 0005897098     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00132-0     Document Type: Article

References (8)

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