Phase formations and electrical properties of doped-PZT/PbTiO3 films deposited by reactive sputtering using multi-targets

Materials Science and Engineering B

Volumn 41, Issue 1, 1996, Pages 16-22

  Choi, Gwang Pyo ^a   Ahn, Joon Hyung ^a   Lee, Won Jae ^a   Sung, Tae Hyun ^a   Kim, Ho Gi ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Fatigue properties; Ta doping; Thin films

Indexed keywords

DOPING (ADDITIVES); ELECTRIC PROPERTIES; PHASE MODULATION; SPUTTERING; THIN FILMS;

FATIGUE PROPERTIES; PHASE FORMATION;

FERROELECTRIC MATERIALS;

EID: 0005872204     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(96)01616-9     Document Type: Article

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