Molibdenum contamination in silicon 1. Molibdenum detection by lifetime techniques

Materials Science and Engineering B

Volumn 53, Issue 3, 1998, Pages 300-309

  Polignano, M L ^a   Bresolin, C ^a   Pavia, G ^a   Soncini, V ^a   Zanderigo, F ^a   Queirolo, G ^a   Di Dio, M ^a  

^a STMICROELECTRONICS   (Italy)

Author keywords

Lifetime techniques; Molibdenum contamination; Silicon

Indexed keywords

CONTAMINATION; SILICON WAFERS; TRANSMISSION ELECTRON MICROSCOPY;

LIFETIME TECHNIQUES;

MOLYBDENUM;

EID: 0005862806     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(98)00149-4     Document Type: Article

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