Precision table control system using friction drive for optical disk mastering machine

International Journal of the Japan Society for Precision Engineering

Volumn 32, Issue 2, 1998, Pages 122-126

  Sakuta, Shigeru ^a   Adachi, Mikio ^a   Ogawa, Kiyoshi ^a   Ueda, Katsunobu ^a   Takasu, Noboru ^a   Taira, Kozo ^a   Nakano, Toshiyuki ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

Air bearing; Compensation; Friction drive; Kr+ laser; Laser interferometer; Optical disk; Pit; Pitch; Precision control; Reflector; Roll; Software servo; Track; Yaw

Indexed keywords

EID: 0005771832     PISSN: 0916782X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (6)

1. R. R. Donaldson et al.: Design of a High Performance Slide and Drive System for a Small Precision Machining, CIRP, 33, (1984) 243.
2. F. Hara et al.: Development of Precise Optical Disk Mastering Machine, Int. Conf. Advance Mechatronics 593.
3. K. Ueda et al.: Machining High-Precision Mirrors Using Newly Developed CNC Machine, CIRP, 401, (1991) 555.
4. Hewlett Packard: 5527A Laser Position Transduce Designer's Guide, p4F-20.
5. S. Sakuta et al.: Experimental Studies on Ultra-precision Positioning - An Inchwarm Movement Method Using Fine and Coarse Positionings-, Int. Journal of Japan Precision Engineering, Vol.27, No3, (1993) 235.
6. K. Taira et al.: High Density Optical Disk Mastering Machine, Optical Memory Symposium, (1994) 115.