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Volumn 119, Issue 1, 1997, Pages 26-30

Nanomechanical properties of sic films grown from ceo precursors using atomic force iviicroscopy

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0005702919     PISSN: 07424787     EISSN: 15288897     Source Type: Journal    
DOI: 10.1115/1.2832475     Document Type: Editorial
Times cited : (4)

References (15)
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  • 3
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  • 6
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    • Growth of Silicon Carbide Films via C® Precursors
    • Hamza, A. V., Balooch, M., and Moalem, M., 1994, “Growth of Silicon Carbide Films via C® Precursors,” Surface Science, Vol. 317, pp. LI129-LI135.
    • (1994) Surface Science , vol.317 , pp. LI129-LI135
    • Hamza, A.V.1    Balooch, M.2    Moalem, M.3
  • 7
    • 84944978915 scopus 로고
    • Silicon Micromechanics: Sensors and Actuators on a Chip
    • Howe, R. T., Muller, R. S, Gabriel, K.J., and Trimmer, W. S. N., 1990, “Silicon Micromechanics: Sensors and Actuators on a Chip,” IEEE Spectrum, Vol. 27, pp. 29-35.
    • (1990) IEEE Spectrum , vol.27 , pp. 29-35
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  • 9
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    • Nanoindentation Hardness Tests Using a Point Contact Microscope
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    • Lu, C.J.1    Bogy, D.2    Kaneko, R.3
  • 11
    • 85025205282 scopus 로고
    • Marshall, R. C., Faust, Jr., J. W., and Ryan, C. E., eds., University of South Carolina, Columbia, SC
    • Silicon Carbide-1973, Marshall, R. C., Faust, Jr., J. W., and Ryan, C. E., eds., University of South Carolina, Columbia, SC, p. 671.
    • (1973) , pp. 671
  • 12
    • 0011713787 scopus 로고
    • The Relation Between Load and Penetration in the Axisymmetric Boussinesq Problem for a Punch of Arbitrary Profile
    • Sneddon, I. N., 1965, “The Relation Between Load and Penetration in the Axisymmetric Boussinesq Problem for a Punch of Arbitrary Profile,” International Journal Engineering Science, Vol. 3, pp. 47-57.
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    • Sneddon, I.N.1
  • 13
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  • 14
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    • Limits of Imaging Resolution for Atomic Force Microscopy of Molecules
    • Weihs, T. P., Nawaz, Z., Jarvis, S. P., and Pethica, J. B., 1991, “Limits of Imaging Resolution for Atomic Force Microscopy of Molecules,” Applied Physics Letters, Vol. 59, pp. 3536-3538.
    • (1991) Applied Physics Letters , vol.59 , pp. 3536-3538
    • Weihs, T.P.1    Nawaz, Z.2    Jarvis, S.P.3    Pethica, J.B.4
  • 15
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    • Tip Artifacts in Atomic Force Microscope Imaging of Thin Film Surfaces
    • Westra, K. L., Mitchell, A. W., and Thomson, D. J., 1993, “Tip Artifacts in Atomic Force Microscope Imaging of Thin Film Surfaces,” Journal of Applied Physics, Vol. 74, pp. 3608-3609.
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.