Surface and interface stress effects on the growth of thin films

Journal of Electronic Materials

Volumn 26, Issue 9, 1997, Pages 966-968

  Cammarata, R C ^a  

^a Johns Hopkins University   (United States)

Author keywords

Critical thickness; Interface stress; Surface stress; Thin film

Indexed keywords

EID: 0005654391     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-997-0232-3     Document Type: Article

References (8)

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4. R.C. Cammarata, Prog. Surf. Sci. 46, 1 (1994).
5. J.W. Matthews, Epitaxial Growth, ed. J.W. Matthews, (New York: Academic, 1975), p. 559.
6. R.C. Cammarata and K. Sieradzki, Appl. Phys. Lett. 55, 1197 (1989).
7. M.F. Doerner and W.D. Nix, CRC Critical Reviews in Solid State and Materials Science 14, 244 (1988).
8. R. Abermann and R. Koch, Thin Solid Films 129, 71 (1985).