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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 3 SUPPL. B, 1997, Pages 1473-1476

Excimer laser induced crystallization of polycrystalline silicon films by adding oxygen

(5) Choi, Hong Seok a Jun, Jae Hong a Park, Cheol Min a Min, Byung Hyuk a Han, Min Koo a

a Seoul National University (South Korea)

Author keywords

Conductivity; Grain growth; Laser annealing; Oxygen; Polycrystalline silicon; Solidification time

Indexed keywords

EID: 0005507201 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.36.1473 Document Type: Article

Times cited : (3)

References (16)

1
- 30244518297
- M. O. Thompson, G. J. Calvin, J. W. Mayer, P. S. Peercy, J. M. Poate, D. C. Jacobson, A. G. Cullis and N. G. Chew: Phys. Rev. Lett. 52 (1984) 2360.
- (1984) Phys. Rev. Lett. , vol.52 , pp. 2360
- Thompson, M.O.¹ Calvin, G.J.² Mayer, J.W.³ Peercy, P.S.⁴ Poate, J.M.⁵ Jacobson, D.C.⁶ Cullis, A.G.⁷ Chew, N.G.⁸

2
- 36549100660
- G. Devaud and D. Turnbull: Appl. Phys. Lett. 46 (1985) 844.
- (1985) Appl. Phys. Lett. , vol.46 , pp. 844
- Devaud, G.¹ Turnbull, D.²

3
- 0001561556
- S. R. Stiffler, M. O. Thompson and P. S. Peercy: Phys. Rev. Lett. 60 (1988) 2519.
- (1988) Phys. Rev. Lett. , vol.60 , pp. 2519
- Stiffler, S.R.¹ Thompson, M.O.² Peercy, P.S.³

4
- 3643050259
- M. O. Thompson, J. W. Mayer, A. G. Cullis, H. C. Webber and N. G. Chew: Phys. Rev. Lett. 50 (1983) 896.
- (1983) Phys. Rev. Lett. , vol.50 , pp. 896
- Thompson, M.O.¹ Mayer, J.W.² Cullis, A.G.³ Webber, H.C.⁴ Chew, N.G.⁵

5
- 30244518297
- M. O. Thompson, G. J. Galvin, J. W. Mayer, P. S. Peercy, J. M. Poate, D. C. Jacobson, A. G. Cullis and N. G. Chew: Phys. Rev. Lett. 52 (1984) 2360.
- (1984) Phys. Rev. Lett. , vol.52 , pp. 2360
- Thompson, M.O.¹ Galvin, G.J.² Mayer, J.W.³ Peercy, P.S.⁴ Poate, J.M.⁵ Jacobson, D.C.⁶ Cullis, A.G.⁷ Chew, N.G.⁸

6
- 84956259688
- H. Kuriyama, S. Kiyama, S. Noguchi, T. Kuwahara, S. Ishida, T. Nohda, K. Sano, H. Iwata, H. Kawata, M. Osumi, S. Tsuda, S. Nakano and Y. Kuwano: Jpn. J. Appl. Phys. 30 (1991) 3700.
- (1991) Jpn. J. Appl. Phys. , vol.30 , pp. 3700
- Kuriyama, H.¹ Kiyama, S.² Noguchi, S.³ Kuwahara, T.⁴ Ishida, S.⁵ Nohda, T.⁶ Sano, K.⁷ Iwata, H.⁸ Kawata, H.⁹ Osumi, M.¹⁰ Tsuda, S.¹¹ Nakano, S.¹² Kuwano, Y.¹³

7
- 3743104177
- K. Shimizu, O. Sugiura and M. Matsumura: Int. Electron Devices Tech. Dig. (1992) p. 669.
- (1992) Int. Electron Devices Tech. Dig. , pp. 669
- Shimizu, K.¹ Sugiura, O.² Matsumura, M.³

8
- 34547923429
- H. Kuriyama, S. Kiyama, S. Noguchi, T. Kuwahara, S. Ishida, T. Nohda, K. Sano, H. Iwata, S. Tsuda and S. Nakano: Int. Electron Devices Tech. Dig. (1991) p. 563.
- (1991) Int. Electron Devices Tech. Dig. , pp. 563
- Kuriyama, H.¹ Kiyama, S.² Noguchi, S.³ Kuwahara, T.⁴ Ishida, S.⁵ Nohda, T.⁶ Sano, K.⁷ Iwata, H.⁸ Tsuda, S.⁹ Nakano, S.¹⁰

9
- 0003879668
- John Wiley & Sons, New York, Chap. 4
- A. S. Grove: Physics and Technology of Semiconductor Devices (John Wiley & Sons, New York, 1967) Chap. 4, pp. 102-103.
- (1967) Physics and Technology of Semiconductor Devices , pp. 102-103
- Grove, A.S.¹

10
- 0025474207
- T. Sameshima, M. Hara, N. Sano and S. Usui: Jpn. J. Appl. Phys. 29 (1990) L1363.
- (1990) Jpn. J. Appl. Phys. , vol.29
- Sameshima, T.¹ Hara, M.² Sano, N.³ Usui, S.⁴

11
- 84977246516
- R. E. Johnson and A. Muan: J. Am. Ceram. Soc. 51 (1968) 430.
- (1968) J. Am. Ceram. Soc. , vol.51 , pp. 430
- Johnson, R.E.¹ Muan, A.²

12
- 36549097163
- J. J. P. Bruines, R. P. M. van Hal, H. M. J. Boots, A. Polman and F. W. Saris: Appl. Phys. Lett. 49 (1986) 1160.
- (1986) Appl. Phys. Lett. , vol.49 , pp. 1160
- Bruines, J.J.P.¹ Van Hal, R.P.M.² Boots, H.M.J.³ Polman, A.⁴ Saris, F.W.⁵

13
- 0022094309
- T. Iizuka, S. Takasu, M. Tajima, T. Arai, N. Inoue and M. Watanabe: J. Electrochem. Soc. 132 (1985) 1707.
- (1985) J. Electrochem. Soc. , vol.132 , pp. 1707
- Iizuka, T.¹ Takasu, S.² Tajima, M.³ Arai, T.⁴ Inoue, N.⁵ Watanabe, M.⁶

14
- 0017959228
- W. A. Lanford, M. J. Rand: J. Appl. Phys. 49 (1978) 2473.
- (1978) J. Appl. Phys. , vol.49 , pp. 2473
- Lanford, W.A.¹ Rand, M.J.²

15
- 3743073099
- J. J. Ewing and C. A. Brav: Appl. Phys. Lett. 27 (1975) 375.
- (1975) Appl. Phys. Lett. , vol.27 , pp. 375
- Ewing, J.J.¹ Brav, C.A.²

16
- 21544455021
- D. L. Staebler and C. R. Wronski: Appl. Phys. Lett. 31 (1977) 292.
- (1977) Appl. Phys. Lett. , vol.31 , pp. 292
- Staebler, D.L.¹ Wronski, C.R.²

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