SCOPUS 정보 검색 플랫폼

Volumn 67, Issue 9, 1996, Pages 3245-3247

1 W plasma x-ray source for lithography at 1 nm wavelength

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0005478101 PISSN: 00346748 EISSN: None Source Type: Journal
DOI: 10.1063/1.1147404 Document Type: Article

Times cited : (8)

References (13)

1
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- I. C. E. Turcu, C. M. Reeves, J. T. M. Stevenson, A. W. S. Ross, A. M. Gundlach, P. Prewett, P. Anastasi, B. Koek, P. Mitchell, and P. Lake, Microelectron. Eng. 27, 295 (1995).
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- Turcu, I.C.E.¹ Reeves, C.M.² Stevenson, J.T.M.³ Ross, A.W.S.⁴ Gundlach, A.M.⁵ Prewett, P.⁶ Anastasi, P.⁷ Koek, B.⁸ Mitchell, P.⁹ Lake, P.¹⁰

2
- 0001549636
- I. C. E. Turcu, I. N. Ross, P. Trenda, C. W. Wharton, R. A. Meldrum, H. Daido, M. S. Schulz, P. Ruck, A. G. Michette, A. P. Juna, J. R. Maldonado, H. Shields, G. J. Tallents, L. Dwivedi, J. Krishnan, D. L. Stevens, T. J. Jenner, D. Batani, and H. Goodson, Proc. Soc. Photo-Opt. Instrum. Eng. 2015, 243 (1994).
- (1994) Proc. Soc. Photo-Opt. Instrum. Eng. , vol.2015 , pp. 243
- Turcu, I.C.E.¹ Ross, I.N.² Trenda, P.³ Wharton, C.W.⁴ Meldrum, R.A.⁵ Daido, H.⁶ Schulz, M.S.⁷ Ruck, P.⁸ Michette, A.G.⁹ Juna, A.P.¹⁰ Maldonado, J.R.¹¹ Shields, H.¹² Tallents, G.J.¹³ Dwivedi, L.¹⁴ Krishnan, J.¹⁵ Stevens, D.L.¹⁶ Jenner, T.J.¹⁷ Batani, D.¹⁸ Goodson, H.¹⁹

3
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- D. E. Andrews and C. N. Archie, Microelectron. Eng. 21, 79 (1993).
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- Andrews, D.E.¹ Archie, C.N.²

4
- 85033836144
- Lambda 4000, 200 W excimer lasers, Lambda Physik GmbH, Hans-Boeckler Str 12, D-3400 Goettingen, Germany
- Lambda 4000, 200 W excimer lasers, Lambda Physik GmbH, Hans-Boeckler Str 12, D-3400 Goettingen, Germany.

5
- 85033851966
- VEL, 1 kW excimer laser, Sopra, 26, Rue Pierre Joigneaux, F92270 Bois-Colombes, France
- VEL, 1 kW excimer laser, Sopra, 26, Rue Pierre Joigneaux, F92270 Bois-Colombes, France.

6
- 0023539977
- E. Turcu, G. Davies, M. Gower, F. O'Neill, and M. Lawless, Microelectron. Eng. 6, 287 (1987).
- (1987) Microelectron. Eng. , vol.6 , pp. 287
- Turcu, E.¹ Davies, G.² Gower, M.³ O'Neill, F.⁴ Lawless, M.⁵

7
- 0040856983
- G. M. Davies, M. C. Gower, F. O'Neill, and I. C. E. Turcu, Appl. Phys. Lett. 53, 1583 (1988).
- (1988) Appl. Phys. Lett. , vol.53 , pp. 1583
- Davies, G.M.¹ Gower, M.C.² O'Neill, F.³ Turcu, I.C.E.⁴

8
- 0000989071
- A. L. Morsell, M. Powers, and H. Shields, Appl. Phys. Lett. 60, 425 (1992).
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- Morsell, A.L.¹ Powers, M.² Shields, H.³

9
- 0000976741
- I. C. E. Turcu, I. N. Ross, and G. J. Tallents, Appl. Phys. Lett. 63, 3046 (1993).
- (1993) Appl. Phys. Lett. , vol.63 , pp. 3046
- Turcu, I.C.E.¹ Ross, I.N.² Tallents, G.J.³

10
- 0001300951
- F. O'Neill, I. C. E. Turcu, D. Xenakis, and M. H. R. Hutchinson, Appl. Phys. Lett. 55, 2603 (1989).
- (1989) Appl. Phys. Lett. , vol.55 , pp. 2603
- O'Neill, F.¹ Turcu, I.C.E.² Xenakis, D.³ Hutchinson, M.H.R.⁴

11
- 0026370728
- I. C. E. Turcu, M. C. Gower, C. J. Reason, P. Huntington, M. Schulz, A. G. Michette, F. Bijkerk, E. Louis, G. J. Tallents, Y. Al-Hadithi, and D. Batani, Proc. Soc. Photo-Opt. Instrum. Eng. 1503, 391 (1991).
- (1991) Proc. Soc. Photo-Opt. Instrum. Eng. , vol.1503 , pp. 391
- Turcu, I.C.E.¹ Gower, M.C.² Reason, C.J.³ Huntington, P.⁴ Schulz, M.⁵ Michette, A.G.⁶ Bijkerk, F.⁷ Louis, E.⁸ Tallents, G.J.⁹ Al-Hadithi, Y.¹⁰ Batani, D.¹¹

12
- 0026374994
- D. Batani, A. Giulietti, L. Paladino, G. J. Tallents, and I. C. E. Turcu, Proc. Soc. Photo-Opt. Instrum. Eng. 1503, 479 (1991).
- (1991) Proc. Soc. Photo-Opt. Instrum. Eng. , vol.1503 , pp. 479
- Batani, D.¹ Giulietti, A.² Paladino, L.³ Tallents, G.J.⁴ Turcu, I.C.E.⁵

13
- 85033845348
- International Patent Application No. PCT/GB94/00928 (1994)
- I. C. E. Turcu and I. N. Ross, International Patent Application No. PCT/GB94/00928 (1994).
- Turcu, I.C.E.¹ Ross, I.N.²

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