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Volumn 2783, Issue , 1996, Pages 55-63

Micro-optics for sensor applications

Author keywords

Lithography; Micro optic; Microlens arrays; Microsystems; Optical computing; Sensors

Indexed keywords

FUSED SILICA; LITHOGRAPHY; MICROLENSES; MICROOPTICS; MICROSYSTEMS; OPTICAL DATA PROCESSING; SENSORS;

EID: 0005435089     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.248510     Document Type: Conference Paper
Times cited : (7)

References (13)
  • 1
    • 84975664464 scopus 로고
    • Technique for the monolithic fabrication of microlens arrays
    • Z. D. Popovic, R. A. Sprague, G. A. Neville-Connell, 'Technique for the monolithic fabrication of microlens arrays', Appl. Opt. 27, 1281 (1988).
    • (1988) Appl. Opt. , vol.27 , pp. 1281
    • Popovic, Z.D.1    Sprague, R.A.2    Neville-Connell, G.A.3
  • 5
    • 0005882780 scopus 로고
    • Evolution of a microlens surface under etching conditions
    • E. Gratix, 'Evolution of a microlens surface under etching conditions', Proc. SPIE 1992, 266-274 (1993).
    • (1993) Proc. SPIE , vol.1992 , pp. 266-274
    • Gratix, E.1
  • 6
    • 0001221196 scopus 로고
    • Dry etching for coherent refractive microlens arrays
    • M. B. Stern, T. R. Jay, 'Dry etching for coherent refractive microlens arrays', Opt. Eng. 33, 3547-3551 (1994).
    • (1994) Opt. Eng. , vol.33 , pp. 3547-3551
    • Stern, M.B.1    Jay, T.R.2
  • 7
    • 0039665819 scopus 로고    scopus 로고
    • Transferring resist microlenses into silicon by RIE
    • M. Eisner, J. Schwider, 'Transferring resist microlenses into silicon by RIE', accepted for Opt. Eng. (1996).
    • (1996) Opt. Eng.
    • Eisner, M.1    Schwider, J.2
  • 10
    • 85079349269 scopus 로고
    • U. S. pat
    • U. S. pat. 08/114, 732 (1993).
    • (1993)
  • 12
    • 0029513350 scopus 로고
    • Construction of a programmable multilayer neural network using space invariant interconnects
    • N. Collings, A. R. Pourzand, R. Volkel, 'Construction of a programmable multilayer neural network using space invariant interconnects', SPIE 2565, 40-47 (1995).
    • (1995) SPIE , vol.2565 , pp. 40-47
    • Collings, N.1    Pourzand, A.R.2    Volkel, R.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.