Technology for movable microstructures - Transfer of laboratory processes to industrial production

Microsystem Technologies

Volumn 4, Issue 3, 1998, Pages 120-121

  Roetting, O ^a   Heckele, M ^a   Bacher, W ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0005402563     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420050111     Document Type: Article

References (2)

1. Both A; Bacher W; Heckele M; Müller KD; Ruprecht R; Strohrmann M: (1996) Microsystems Technologies 2, 104-108, (1996)
2. Heckele M; Bacher W; Müller KD: (1996) Publication this conference