Spin-cast planarization of liquid-crystal-on-silicon microdisplays

Optics Letters

Volumn 22, Issue 19, 1997, Pages 1512-1514

  Schuck, Miller H ^a   McKnight, Douglas J ^a   Johnson, Kristina M ^a  

^a UCB 450   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0005374790     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.22.001512     Document Type: Article

References (17)

1. K. M. Johnson, D. J. McKnight, and I. Underwood, IEEE J. Quantum Electron. 29, 699 (1993).
2. R. Narayanswamy, R. Turner, D. McKnight, K. Johnson, and J. Sharpe, Opt. Lett. 20, 1362 (1995).
3. D. O'Brien, D. McKnight, and A. Fedor, Ferroelectrics 181, 79 (1996).
4. D. J. McKnight, K. M. Johnson, and R. A. Serati, Appl. Opt. 33, 2775 (1994).
5. D. J. McKnight, K. M. Johnson, and M. A. Follett, Opt. Lett. 20, 513 (1994).
6. D. J. McKnight, S. A. Serati, and K. M. Johnson, Ferroelectrics 181, 171 (1996).
7. M. H. Schuck, D. J. McKnight, and K. M. Johnson, presented at the Society of Industrial Design International Symposium, San Diego, Calif, dates, 1996.
8. I. Underwood, D. G. Vass, A. O'Hara, D. Burns, P. McOwan, and J. Gourlay, Appl. Opt. 33, 2768 (1994).
9. K. Kasahara, T. Yanagisawa, K. Sakai, T. Adachi, K. Inoue, T. Tsutsumi, and H. Hori, IEEE Trans. Electron. Devices ED-28, 744 (1981).
10. D. Burdeaux, P. Townsend, and J. Carr, J. Electron. Mater. 19, 1357 (1990).
11. A. O'Hara, J. R. Hannah, I. Underwood, D. G. Vass, and R. J. Holwill, Appl. Opt. 32, 5549 (1993).
12. S. Sivaram, H. Bath, R. Leggett, A. Maury, K. Monnig, and R. Tolles, Solid State Technol. 35, 87 (1992).
13. H. Litvak and H. Tzeng, Semiconductor Int. 19(7), 259 (1996).
14. Dow Chemical Company, Cyclotene 3022 Advanced Electronic Resins, Technical data manual (Dow Chemical Company, Midland, Mich., 1994).
15. T. Shimoto, K. Matsui, M. Kimura, and K. Utsumi, presented at the International Symposium on Microelectronics, Yokohama, Japan, June 3-5, 1992.
16. M. Dibbs, P. Townsend, T. Stokich, B. Huber, C. Mohler, R. Heistand, P. Garrou, G. Adema, M. Berry, and I. Turlik, presented at the 6th International Society for the Advancement of Materials and Process Engineering, Electronic Materials and Processes Conference, Baltimore, Md., June 23-25, 1992.
17. M. Schier, J. Electrochem. Soc. 142, 3238 (1995).