Electrical properties of thermal oxide grown using dry oxidation on p-type 6H-silicon carbide

Applied Physics Letters

Volumn 65, Issue 17, 1994, Pages 2177-2178

  Alok, Dev ^a   McLarty, P K ^a   Baliga, B J ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0005325568     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.112753     Document Type: Article

References (0)