Single-wafer, sige heterostructures grown by cold wall UHV-CVD: Application to hetero-junction Bipolar Transistor (HBT) fabrication

European Solid-State Device Research Conference

Volumn , Issue , 1994, Pages 745-748

  Glowacki, F ^a   Campidelli, Y ^a   Garchery, L ^a   Gruhle, A ^b  

^a ORANGE LABS   (France)

^b DAIMLER AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COLD WALL; SINGLE WAFER; UHV-CVD;

EID: 0005321782     PISSN: 19308876     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)