Low-temperature pre-metal dielectrics for future ICs

Solid State Technology

Volumn 41, Issue 9, 1998, Pages 69-78

  Nag, Somnath ^a   Ramamurthy, Raman ^a   Lei, W Jack ^a,b   Monteil, Christophe ^a   Hickey, Mark ^a,c  

^a Watkins Johnson Company   (United States)

^b UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0005307909     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (8)

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5. S. Nag et al., IEDM Tech. Digest, p. 585, 1996.
6. J. Franke et al., Spectrochimica Acta, Vol. 50A, No. 10, p.1687, 1994.
7. J. Li, doctoral dissertation, Stanford Univ., p. 285, Mar. 1996.
8. S. Fang, J. McVittie, J. App. Phys., Vol. 72, p. 4685, 1992.