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Volumn 5, Issue 2, 1996, Pages 124-127
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In situ doping of DLC films
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Author keywords
DLC films; Doping; Electrical properties
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Indexed keywords
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EID: 0005304996
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/0925-9635(95)00476-9 Document Type: Article |
Times cited : (3)
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References (9)
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