Lift-off technique of homoepitaxial CVD diamond films by deep implantation and selective etching

Diamond and Related Materials

Volumn 6, Issue 5-7, 1997, Pages 654-657

  Locher, R ^a   Behr, D ^a   Gullich H ^a   Herres, N ^a   Koidl, P ^a   Samlenski, R ^b   Brenn, R ^b  

^a FRAUNHOFER INSTITUTE FOR APPLIED SOLID STATE PHYSICS IAF   (Germany)

^b Fak Physik Freiburger M   (Germany)

Author keywords

Homoepitaxy; Ion implantation; Raman spectroscopy; X ray

Indexed keywords

EID: 0005295699     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(96)00662-0     Document Type: Article

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