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Volumn 53, Issue 1, 1996, Pages 33-40

Effect of remote oxygen-plasma for SiOx film preparation

Author keywords

Organic Silicon Compound; Plasma Polymerization; Remote Oxygen Plasma; SiOx

Indexed keywords

COMPOSITION; FILM PREPARATION; GLOW DISCHARGES; OXIDATION; PLASMA APPLICATIONS; POLYMERIZATION; SILICON COMPOUNDS;

PLASMA POLYMERIZATION; REMOTE OXYGEN PLASMA;

PLASTIC FILMS;

EID: 0005281412 PISSN: 03862186 EISSN: None Source Type: Journal
DOI: 10.1295/koron.53.33 Document Type: Article

Times cited : (2)

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