Chapter 1 Surface processes in epitaxial growth

Chemical Physics of Solid Surfaces

Volumn 8, Issue C, 1997, Pages 1-45

  Venables, John A ^a,b  

^a ARIZONA STATE UNIVERSITY   (United States)

^b UNIVERSITY OF SUSSEX   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0005218469     PISSN: 15710785     EISSN: None     Source Type: Book Series    
DOI: 10.1016/S1571-0785(97)80004-1     Document Type: Article

References (191)

1. Previous reviews include. Bauer E. Z. Kristallogr. 110 (1958) 372
2. In: Schneider H.G., and Ruth V. (Eds). Advances in Epitaxy and Endotaxy (1971), VEB, Leipzig
3. Bauer E., and Poppa H. Thin Solid Films 12 (1972) 167
4. Lewis B., and Anderson J.C. Nucleation and Growth of Thin Films (1978), Academic Press, London
5. Kern R., LeLay G., and Metois J.J. In: Kaldis E. (Ed). Current Topics in Materials Science 3 (1979), North-Holland, Amsterdam 139
6. Stoyanov S., and Kaschiev D. In: Kaldis E. (Ed). Current Topics in Materials Science 7 (1981), North-Holland, Amsterdam 69
7. Venables J.A., Spiller G.D.T., and Hanbucken M. Rep. Prog. Phys. 47 (1984) 399
8. In: Matthews J.W. (Ed). Epitaxial Growth, parts A and B (1975), Academic Press, New York
9. Chap. 4. Venables J.A., and Price G.L. Epitaxial Growth, parts A and B (1975), Academic Press, New York
10. Venables J.A. Phil. Mag. 27 (1973) 697
11. Burton W.K., Cabrera N., and Frank F.C. Phil. Trans. Roy. Soc. A243 (1951) 299
12. Chap. 19. Mutaftschiev B. In: Nabarro F.R.N. (Ed). Dislocations in Solids Vol 5 (1980), North-Holland, Amsterdam
13. Klaua M. In: Bethge H., and Heydenreich J. (Eds). Electron Microscopy in Solid State Physics (1987), Elsevier, Amsterdam 454
14. see also. Bethge H. In: Lagally M.G. (Ed). Kinetics of Ordering and Growth at Surfaces. NATO ASI B239 (1990), Plenum 125
15. Meinel K., Klaua M., and Bethge H. J. Cryst. Growth 89 (1988) 447
16. Meinel K., Klaua M., and Bethge H. Phys. Stat. Sol. (a) 110 (1988) 189
17. Gretz R.D. Surf. Sci. 6 (1967) 468
18. Frankl D.R., and Venables J.A. Adv. Phys. 19 (1970) 409
19. van Leeuwen C., and Bennema P. Surf. Sci. 51 (1975) 109
20. Gates A.D., and Robins J.L. Thin Solid Films 149 (1987) 113
21. Robins J.L. Appl. Surf. Sci. 33/34 (1988) 379
22. Conrad R., and Harsdorff M. Int. J. Electron. 69 (1990) 153
23. and refs quoted. Kellogg G.L. Surf. Sci. Rep. 24 (1994) 1
24. Ehrlich G. Surf. Sci. 246 (1990) 1
25. Ehrlich G. Surf. Sci. 299/300 (1994) 628
26. Ehrlich G. Surf. Sci. 331/335 (1995) 865
27. and refs quoted. Ehrlich G. Scanning Microscopy 4 (1990) 829
28. Eigler D.M., and Schweizer E.K. Nature 344 (1990) 524
29. Crommie M.F., Lutz C.P., Eigler D.M., and Heller E.J. Physica D83 (1995) 98
30. Crommie M.F., Lutz C.P., Eigler D.M., and Heller E.J. Surf Sci. 361/362 (1996) 864
31. Venables J.A. J. Vac. Sci. Tech. B4 (1986) 870
32. Venables J.A. Phys. Rev. B36 (1987) 4153
33. See e.g. Woodruff D.P., and Delchar T. Techniques of Surface Science (1986), Cambridge University Press
34. Luth H. Surfaces and Interfaces of Solid Materials (1993), Springer
35. Henry C.R., Chapon C., Duriez C., and Gorgio S. Surf. Sci. 253 (1991) 177
36. Henry C.R., Chapon C., Duriez C., and Gorgio S. Surf. Sci. 253 (1991) 190
37. Henry C.R., chapon C., Goyhenex C., and Monot R. Surf. Sci. 272 (1992) 283
38. Spiller G.D.T., Akhter P., and Venables J.A. Surf. Sci. 131 (1983) 517
39. Jones G.W., and Venables J.A. Ultramicroscopy 18 (1985) 439
40. Jones G.W., Marcano J.M., Norskov J.K., and Venables J.A. Phys. Rev. Lett. 65 (1990) 3317
41. Futamoto M., Hanbucken M., Harland C.J., Jones G.W., and Venables J.A. Surf. Sci. 150 (1985) 430
42. Harland C.J., Jones G.W., Doust T.N., and Venables J.A. SEM Supplement 1 (1987) 109
43. Persaud R., Noro H., Azim M., Milne R.H., and Venables J.A. Scanning Microscopy 8 (1994) 803
44. Bauer E. Surf. Sci. 299/300 (1994) 102
45. Bauer E. Rep. Prog. Phys. 57 (1994) 895
46. K. Yagi, in High Resolution Transmission Electron Microscopy and Associated Techniques, P. Buseck, J.M. Cowley and L. Eyring (eds), Oxford, 1988, chap. 13
47. Ichikawa M. Mater. Sci. Rep. 4 (1989) 147
48. Yagi K. Adv. Optical & Electron Microscopy 11 (1989) 57
49. Yagi K. Surf. Sci. Rep. 17 (1993) 305
50. Venables J.A., Smith D.J., and Cowley J.M. Surf. Sci. 181 (1987) 235
51. Neddermeyer H. Crit. Rev. Solid State & Mater. Sci. 16 (1990) 309
52. Bales G.S., and Chrzan D.C. Phys. Rev. B50 (1994) 6057
53. Bartelt M.C., and Evans J.W. Phys. Rev. B46 (1992) 12675
54. Bartelt M.C., and Evans J.W. J. Vac. Sci. Tech. A12 (1994) 1800
55. Amar J.G., and Family F. Phys. Rev. Lett 74 (1995) 2066
56. Amar J.G., and Family F. Phys. Rev. B52 (1995) 13801
57. Mulheran P.A., and Blackman J.A. Philos. Mag. 72 (1995) 55. show a strong correlation of individual island growth rates with the areas of Voronoi polyhedra around each island, known previously from experiment
58. Mulheran P.A., and Blackman J.A. Phys. Rev. B53 (1996) 10261. show a strong correlation of individual island growth rates with the areas of Voronoi polyhedra around each island, known previously from experiment
59. developing a quantitative model is current research. Venables J.A., and Ball D.J. Proc. Roy. Soc. A322 (1971) 331. show a strong correlation of individual island growth rates with the areas of Voronoi polyhedra around each island, known previously from experiment
60. Venables J.A., Drucker J.S., Krishnamurthy M., Raynerd G., and Doust T. Mat. Res. Soc. Symp. 198 (1990) 93
61. Venables J.A., Drucker J.S., Krishnamurthy M., Raynerd G., and Doust T. Surf. Sci. 299/300 (1994) 798
62. Bales G.S. Mat. Res. Soc. Symp. 399 (1996) 37
63. Bales G.S. Surf. Sci 356 (1996) L439
64. Myers-Beaghton A.K., and Vvedensky D.D. Phys. Rev. B44 (1991) 2457
65. Fuenzalida V. Phys. Rev. B44 (1991) 10835
66. Kajikawa Y., Hata M., Isu T., and Katayama Y. Surf. Sci. 265 (1992) 241
67. Ratsch C., Nelson M.D., and Zangwill A. Phys. Rev. B50 (1994) 14489
68. Roland C., and Gilmer G.H. Phys. Rev. B54 (1996) 2931
69. The edge barrier name stems from two papers. Ehrlich G., and Hudda F.G. J. Chem. Phys. 44 (1966) 1039
70. Schwoebel R.L., and Shipsey E.J. J. Appl. Phys. 37 (1966) 3682
71. Villain J. J. Phys. I France 1 (1991) 19
72. Elkinani I., and Villain J. J. Phys I France 4 (1994) 949
73. Pimpinelli A., Villain J., Wolf D.E., Metois J.J., Heyraud J.C., Elkinani I., and Uimin G. Surf. Sci. 295 (1993) 143
74. Pimpinelli A., Elkinani I., Karma A., Misbah C., and Villain J. J. Phys. Condens. Matter 6 (1994) 2661
75. Politi P., and Villain J. Phys. Rev. B54 (1996) 5114
76. Vincent R.A. Proc. Roy. Soc A321 (1971) 53
77. Briscoe B.J., and Galvin K.P. Phys. Rev. A43 (1991) 1906
78. Meakin P. Rep. Prog. Phys. 55 (1992) 157
79. Zinke-Allmang M., Feldman L.C., and Grabow M.H. Surf. Sci. Rep. 16 (1992) 377
80. Sholl D.S., and Skodje R.T. Surf. Sci. 334 (1996) 305
81. in press. Sholl D.S., and Skodje R.T. Physica A (1996)
82. Gringerich K.A., Shim I., Gupta S.K., and Kingcade J.E. Surf. Sci. 156 (1985) 495
83. Schmidt A., Schunemann V., and Anton R. Phys. Rev. B41 (1990) 11875
84. Anton R., Schmidt A., and Schunemann V. Vacuum 41 (1990) 1099
85. Gates A.D., and Robins J.L. Surf. Sci. 116 (1982) 188
86. Gates A.D., and Robins J.L. Surf. Sci. 191 (1987) 492
87. Gates A.D., and Robins J.L. Surf. Sci. 191 (1987) 499
88. Zanghi J.C., Metois J.J., and Kern R. Surf. Sci. 52 (1975) 556
89. Zanghi J.C. Surf. Sci. 60 (1976) 425
90. Velfe H.D., and Krohn M. Thin Solid Films 98 (1982) 125
91. Gates A.D., and Robins J.L. Surf. Sci. 194 (1988) 13
92. Kern R., and Krohn M. Phys. Stat. Sol. (a) 116 (1989) 23
93. chapter 7; see also chapters on oxides in this volume. Heinrich V.E., and Cox P.A. The Surface Science of Metal Oxides, Cambridge (1994)
94. Heim K.R., Coyle S.T., Hembree G.G., Venables J.A., and Scheinfein M.R. J. Appl. Phys. 80 (1996) 1161
95. J.A. Venables, Physica A, in press.
96. von Harrach H. Thin Solid Films 22 (1974) 305
97. Chan E.M., Buckingham M.J., and Robins J.L. Surf. Sci. 67 (1977) 285
98. Gates A.D., and Robins J.L. Surf. Sci. 194 (1988) 13
99. Didier F., and Jupille J. Surf. Sci. 307-309 (1994) 587
100. Flank A.M., Delauney R., Lagarde P., Pompa M., and Jupille J. Phys. Rev. B 53 (1996) R1737
101. Duffy D.M., Harding J.H., and Stoneham A.M. Phil. Mag A 67 (1993) 865
102. Mejias J.A. Phys. Rev. B 53 (1996) 10281
103. J.H. Harding, J.A. Venables, D.M. Duffy and A.M. Stoneham, (1996) in preparation.
104. Kariotis R., and Lagally M.G. Surf. Sci. 216 (1989) 557
105. Kariotis R. J. Phys. A 22 (1989) 2781
106. see also refs [30]. Kariotis R., and Rowlands G. In: Lagally M.G. (Ed). Kinetics of Ordering and Growth at Surfaces. NATO ASI B239 (1990), Plenum 313
107. see also. Kunkel R., Poelsema B., Verheij L.K., and Comsa G. Phys. Rev. Lett. 65 (1990) 733
108. Tersoff J., Denier van der Gon A., and Tromp R.M. Phys. Rev. Lett. 72 (1994) 266
109. for Ag/Ag(111) and Ag/Pt(111), see. Brune H., Roder H., Boragno C., and Kern K. Phys. Rev. Lett. 73 (1994) 1995
110. and chapter by Kern and Brune; for Ag/Pt(111) calculation, see. Brune H., Roder H., Bromann K., Kern K., Jacobsen J., Stolze P., Jacobsen K.W., and Norskov J. Surf. Sci. 349 (1996) L115
111. for Ag/Ag(100) and (111) see. Feibelman P.J. Surf. Sci. 313 (1994) L801
112. Yu B.D., and Scheffler M. Phys. Rev. Lett. 77 (1996) 1095
113. Boisvert G., Lewis L.J., Puska M.J., and Niemenen R.M. Phys. Rev. B 52 (1995) 9078
114. for Fe/Fe(100), Cu/Cu(100) and Au/Au(100), see. Bartelt M.C., Gunther S., Kopatzki E., Behm R.J., and Evans J.W. and refs quoted; for Ni/Ni(100), see. Phys. Rev. B 53 (1996) 4099
115. and refs quoted. Bartelt M.C., Perkins L.S., and Evans J.W. Surf. Sci. 344 (1996) L1193
116. for Pt/Pt(111) see. Bott M., Hohage M., Morgenstern M., Michely T., and Comsa G. Phys. Rev. Lett. 76 (1996) 1304
117. for Cu/Cu(111) see. Jacobsen J., Jacobsen K.W., and Norskov J. Surf. Sci. 359 (1996) 37
118. Wulfhekel W., Lipkin N.N., Kliewer J., Rosenfeld G., Jorritsma L.C., Poelsema B., and Comsa G. Surf. Sci. 348 (1996) 227
119. Evans J.W., Flynn D.K., and Thiel P.A. Ultramicroscopy 31 (1989) 80
120. Evans J.W. Phys. Rev. B 43 (1990) 3897
121. Sanders D.E., and DePristo A.E. Surf. Sci. 254 (1991) 341
122. Lagally M.G., Mo Y.W., Kariotis R., Swartentruber B.S., and Webb M.B. In: Lagally M.G. (Ed). Kinetics of Ordering and Growth at Surfaces. NATO ASI B239 (1990), Plenum 145
123. Mo Y.-W., and Lagally M.G. Surf. Sci. 248 (1991) 313
124. Mo Y.W., Kleiner J., Webb M.B., and Lagally M.G. Phys. Rev. Lett. 66 (1991) 1998
125. See e.g. Joyce B.A., Vvedensky D.D., and Foxon C.T. In: Mahajan S. (Ed). Handbook of Semiconductors volume 3 (1994), Elsevier 275
126. Arthur J.R. Surf. Sci. 299/300 (1994) 818
127. Madhukar A., and Ghaisas S.V. Crit. Rev. Solid State & Mater. Sci. 14 (1988) 1
128. Shitara T., Vvedensky D.D., Wilby M.R., Zhang J., Neave J.H., and Joyce B.A. Phys. Rev. B 46 (1992) 6815
129. Shitara T., Vvedensky D.D., Wilby M.R., Zhang J., Neave J.H., and Joyce B.A. Phys. Rev. B 46 (1992) 6825
130. Krishnamurthy M., Lorke A., and Petroff P.M. Surf. Sci. 304 (1994) L493
131. Johnson M.D., Sudijono J., Hunt A.W., and Orr B.G. Surf. Sci. 298 (1993) 392
132. for large area STM images of MBE GaAs, see. Johnson M.D., Orme C., Hunt A.W., Graff D., Sudijono J., Sander L.M., and Orr B.G. Phys. Rev. Lett. 72 (1993) 116
133. Johnson M.D., Orme C., Hunt A.W., Graff D., Sudijono J., Sander L.M., and Orr B.G. Surf. Sci. 280 (1993) 247
134. Noro H., Persaud R., and Venables J.A. Vacuum 46 (1995) 1173
135. Noro H., Persaud R., and Venables J.A. Surf. Sci. 357/358 (1996) 879
136. Jacobsen K.W., Norskov J.N., and Puska M.J. Phys. Rev. B 35 (1987) 7423
137. Sanders D.E., and DePristo A.E. Surf. Sci. 260 (1992) 116
138. Norskov J.K., Jacobsen K.W., Stolze P., and Hansen L.B. Surf. Sci. 283 (1993) 277
139. Massobrio C., and Blandin P. Phys. Rev. B 47 (1993) 13687
140. Bermond J.M., and Venables J.A. J. Cryst. Growth 64 (1983) 239
141. More details of these systems are given in the following chapter by E. Bauer.
142. Venables J.A., Derrien J., and Janssen A.P. Surf. Sci. 95 (1980) 411
143. see also. Hanbucken M., Futamoto M., and Venables J.A. Surf. Sci. 147 (1984) 433
144. Ino S., Yamanaka T., and Ito S. Surf. Sci. 283 (1993) 319
145. Endo A., and Ino S. Surf. Sci. 293 (1993) 165
146. Endo A. Surf. Sci. 297 (1993) 71
147. Raynerd G., Hardiman M., and Venables J.A. Phys. Rev. B 44 (1991) 13803
148. and refs quoted. Raynerd G., Doust T.N., and Venables J.A. Surf. Sci. 261 (1992) 251
149. in press. Metacalfe F.L., and Venables J.A. Surf. Sci. (1996)
150. in press. Venables J.A., Metcalfe F.L., and Sugawara A. Surf. Sci. (1996)
151. Wan K.J., Lin X.F., and Nogami J. Phys. Rev. B 45 (1992) 9509
152. Wan K.J., Lin X.F., and Nogami J. Phys. Rev. B 47 (1993) 13700
153. Nogami J., Wan K.J., and Glueckstein J.C. Jap. J. Appl. Phys. 33 (1994) 3679
154. Hammar M., Gotethelid M., Karlsson U.O., and Flodstrom S.A. Phys. Rev B 47 (1993) 15669
155. Denier van der Gon A., and Tromp R.M. Phys. Rev. Lett. 69 (1992) 3519
156. Luo F.C.H., Hembree G.G., and Venables J.A. Mat. Res. Soc. Symp. 202 (1991) 49
157. Iraji-Zad A., and Hardiman M. Solid State Comm. 82 (1992) 467
158. Maree P.M.J., Nakagawa K., Mulders F.M., and van der Veen J.F. Surf. Sci. 191 (1987) 305
159. Copel M., Reuter M.C., Kaxiras E., and Tromp R.M. Phys. Rev. Lett. 63 (1989) 632
160. Krishnamurthy M., Drucker J.S., and Venables J.A. J. Appl. Phys. 69 (1991) 6461
161. Krishnamurthy M., Drucker J.S., and Venables J.A. Mat. Res. Soc. Symp. 202 (1991) 77
162. Eaglesham D.J., and Cerullo M. Phys. Rev. Lett. 64 (1990) 1943
163. Williams A.A., Thornton J.M.C., McDonald J.E., van Silfhout R.G., van der Veen J.F., Finney M.S., Johnson A.D., and Norris C. Phys. Rev. B 43 (1991) 5001
164. Drucker J.S. Mat. Res. Soc. Sump. 280 (1993) 389
165. Drucker J.S. Phys. Rev. B 48 (1993) 18203
166. for a discussion of how hut clusters and ripple patterns may nucleate, see. Mo Y.W., Savage D.E., Swartzentruber B.S., and Lagally M.G. Phys. Rev. Lett. 65 (1990) 1020
167. Jesson D.E., Chen K.M., Pennycook S.J., Thundat T., and Warmack R.J. Phys. Rev. Lett. 77 (1996) 1330
168. Knall J., and Pethica J.B. Surf. Sci. 265 (1992) 156
169. Horn-von Hoegen M., Muller B.H., Al-Falou A., and Henzler M. Phys. Rev. Lett. 71 (1993) 3170
170. Horn-von Hoegen M., Muller B.H., Al-Falou A., and Henzler M. Phys. Rev. B 50 (1994) 11650
171. for Si and Ge/Si(111), with surfactants, see. Sakai A., and Tatsumi T. Phys. Rev. B 71 (1993) 4007
172. Voigtlander B., Zimmer A., Weber T., and Bonzel H.P. Phys. Rev. B 51 (1995) 7583
173. Cullis A.G., Robbins D.J., Barnett S.J., and Pidduck A.J. J. Vac. Sci. Tech. A 12 (1994) 1924
174. Tersoff J., Teichert C., and Lagally M.G. Phys. Rev. Lett. 76 (1996) 1675
175. Teichert C., Lagally M.G., Peticolas L.J., Bean J.C., and Tersolff J. Phys. Rev. B 53 (1996) 16334
176. Chen X., Wu F., Zhang Z., and Lagally M.G. Phys. Rev. Lett. 73 (1994) 850
177. Chen X., Wu F., Zhang Z., and Lagally M.G. Phys. Rev. Lett. 74 (1995) 574
178. for an introduction to strain effects at Si(100) surfaces, see. Wu F., and Lagally M.G. Phys. Rev. Lett. 75 (1995) 2534
179. Webb M.B. Surf. Sci. 299/300 (1994) 454
180. Godbey D.J., and Ancona M. Appl. Phys. Lett. 61 (1992) 2217
181. Godbey D.J., and Ancona M. J. Vac. Sci. Tech. B 11 (1992) 1392
182. Li Y., Hembree G.G., and Venables J.A. Appl. Phys. Lett. 67 (1995) 276
183. For a review of early work, see. Egelhoff Jr. W.T. Mat. Res. Soc. Symp. 229 (1991) 27
184. Meyer J.A., and Behm R.J. Surf. Sci. 322 (1995) L275
185. Stroscio J., Pierce D.T., Dragoset R.A., and First P.N. J. Vac. Sci. Tech. A 10 (1992) 1981
186. Meyer J.A., Baikie I.D., Kopatzki E., and Behm R.J. Surf. Sci. 365 (1995) L647
187. Chambliss D.D., and Johnson K.E. Phys. Rev. B 50 (1994) 5012
188. Healy S.D., Heim K.R., Wang Z.J., Hembree G.G., Drucker J.S., and Scheinfein M. J. Appl. Phys. 75 (1994) 5592
189. Zangwill A., and Kaxiras E. Surf. Sci. 326 (1995) L483
190. Bales G.S. Mat. Res. Soc. Symp. 399 (1996) 37
191. Persaud R., Noro H., and Venables J.A. Mat. Res. Soc. Symp. 399 (1996) 207