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Volumn 67, Issue 1, 1990, Pages 580-583

Radiation-induced charge neutralization and interface-trap buildup in metal-oxide-semiconductor devices

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0005123159     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.345199     Document Type: Article
Times cited : (105)

References (31)
  • 6
    • 84950567834 scopus 로고    scopus 로고
    • previous studies this phenomenon has been referred to as radiation‐induced “annealing,” Because no measurable creation or annihilation of defects in the oxide occurs (Refs. 7–10) during these experiments (only the charge state of the oxide trap is changed), we refer to this process as radiation‐induced “charge neutralization.”
  • 22
    • 84950567837 scopus 로고    scopus 로고
    • It is probable that hole trapping near the gate and oxide‐trap charge neutralization are both occurring in these devices for biases below — 10 V, but the rates are small enough that no measurable change is observed in [Formula Omitted] with 10‐krad irradiation.
  • 29
    • 84950567836 scopus 로고    scopus 로고
    • While some holes are likely being trapped near the gate during the negative bias irradiations, these apparently do not change the oxide electric field significantly, as evidenced by the constant rate of charge neutralization between — 1 and — 4 V in Fig. 2.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.