In situ determination of the surface roughness of diamond films using optical pyrometry

Applied Physics Letters

Volumn 72, Issue 8, 1998, Pages 903-905

  Akkerman, Z L ^a   Song, Y ^a   Yin, Z ^a   Smith, F W ^a   Gat, Roy ^b  

^a CITY COLLEGE OF NEW YORK   (United States)

^b Applied Science and Technology Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0005095772     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.120931     Document Type: Article

References (6)

1. J. Lee, B. Hong, R. Messier, and R. W. Collins, J. Appl. Phys. 80, 6489 (1996).
2. Z. Yin, Z. L. Akkerman, F. W. Smith, and R. Gat, in Thin Films-Structure and Morphology, edited by S. C. Moss, D. Ila, R. C. Cammarata, E. H. Chason, T. L. Einstein, and E. D. Williams (Mater. Res. Soc., Pittsburgh, PA, 1997), Vol. 441, p. 653.
3. K. A. Snail and C. M. Marks, Appl. Phys. Lett. 60, 3135 (1992).
4. Z. Yin, H. S. Tan, and F. W. Smith, Diamond Relat. Mater. 5, 1490 (1996).
5. 1)=19.0.
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