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Volumn 2000-January, Issue , 2000, Pages 256-262
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Optimizing the cost of design rule modifications for subsequent generations of semiconductor technology
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Author keywords
Cost function; Design optimization; Geometry; Manufacturing processes; Process design; Product development; Scalability; Semiconductor device manufacture; Silicon; Spatial databases
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Indexed keywords
COST FUNCTIONS;
COSTS;
DESIGN;
GEOMETRY;
MANUFACTURE;
PROCESS DESIGN;
PRODUCT DESIGN;
PRODUCT DEVELOPMENT;
SCALABILITY;
SEMICONDUCTING SILICON;
SEMICONDUCTOR DEVICES;
SILICON;
AGGRESSIVE SCALING;
DESIGN OPTIMIZATION;
MANUFACTURING PROCESS;
NEW PRODUCT DEVELOPMENT;
PROCESS DEVELOPMENT;
SEMICONDUCTOR MANUFACTURING;
SEMICONDUCTOR TECHNOLOGY;
SPATIAL DATABASE;
SEMICONDUCTOR DEVICE MANUFACTURE;
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EID: 0005080648
PISSN: 10788743
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/ASMC.2000.902597 Document Type: Conference Paper |
Times cited : (3)
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References (4)
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