Identification of topmost atom on InP (001) surface by coaxial impact collision ion scattering spectroscopy

Journal of Electronic Materials

Volumn 25, Issue 4, 1996, Pages 667-670

  Nishihaka, T ^a   Shinohara, M ^a   Ishiyama, O ^a   Ohtani, F ^a   Yoshimoto, M ^b   Maeda, T ^b   Koinuma, H ^b  

^a SHIMADZU CORPORATION   (Japan)

^b TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Ar sputtering; Coaxial impact collision ion scattering spectroscopy (CAICISS); Indium phosphide; Ion scattering spectroscopy; Surface analysis

Indexed keywords

EID: 0005076664     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/bf02666521     Document Type: Article

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