Continuous calibration of a vacuum ultraviolet system from 65 to 125 nm by a cascade arc and comparison with the calibrated line radiation of a hollow cathode

Applied Optics

Volumn 36, Issue 9, 1997, Pages 1994-2000

  Frost, Robert Martin ^a   Awakowicz, Peter ^a  

^a TECHNICAL UNIVERSITY OF MUNICH   (Germany)

Author keywords

Cascade arc; Continuous calibration in the VUV; Hollow cathode

Indexed keywords

EID: 0005074557     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.36.001994     Document Type: Article

References (16)

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