Study of the dc saddle-field discharge: Application to methane

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 3, 1999, Pages 713-720

  Sagnes, E ^a   Szurmak, J ^a   Manage, D ^a   Zukotynski, S ^a  

^a UNIVERSITY OF TORONTO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0005047468     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581694     Document Type: Article

References (16)

1. J. Franks and A. M. Ghander, Vacuum 24, 489 (1974).
2. J. Franks, J. Mass. Spectrom. Ion Phys. 46, 363 (1983).
3. M. Harry and S. Zukotynski, J. Vac. Sci. Technol. A 9, 496 (1991).
4. W. C. W. Chan, F. Gaspari, T. Allen, P. K. Lim, E. Moreno, E. Sagnes, D. Manage, J. Szurmak, and S. Zukotynski, J. Vac. Sci. Technol. A 16, 889 (1997).
5. J. Robertson, Adv. Phys. 32, 361 (1983).
6. D. Gupta and S. P. Varma, Applications of Diamond Films and Related Materials, edited by A. Feldman et al., National Institute of Standards and Technology special publication 885 (U.S. Goverment Printing Office, Washington, DC, 1995), p. 789.
7. S. C. Brown, Introduction to Electrical Discharges in Gases (Wiley, New York, 1966).
8. C. S. Lakshminarasimha and J. Lucas, J. Phys. D 10, 313 (1977).
9. E. Kunhardt, Electrical Breakdown and Discharges in Gases (Plenum, New York, 1983).
10. J. D. Cobine, Gaseous Conductors (Dover, New York, 1958).
11. S. C. Brown, Basic Data of Plasma Physics (MIT Press, Cambridge, MA, 1959).
12. H. V. Boenig, Plasma Science and Technology (Cornell University Press, Ithaca, NY, 1982).
13. C. Bodeldijk, Atomic and Plasma-Material Interaction Data for Fusion (IAEA, Vienna, 1992), Vol. 2.
14. F. Chen, Introduction to Plasma Physics (Plenum, New York, 1974).
15. R. V. Kruzelecky, S. Zukotynski, C. I. Ukah, F. Gaspari, and J. M. Perz, J. Vac. Sci. Technol. A 7, 2632 (1989).
16. B. Chapman, Glow Discharge Processes (Wiley, New York, 1980).