-
1
-
-
0025791333
-
Airborne Chemical Contamination of a Chemically Amplified Resist
-
Bellingham, WA, International Society for Optical Engineering (SPIE)
-
MacDonald SA, Clecak NJ, Wendt HR, et al., "Airborne Chemical Contamination of a Chemically Amplified Resist," in Proceedings of Advances in Resist Technology and Processing VIII, Bellingham, WA, International Society for Optical Engineering (SPIE), pp 2-12, 1991.
-
(1991)
Proceedings of Advances in Resist Technology and Processing VIII
, pp. 2-12
-
-
MacDonald, S.A.1
Clecak, N.J.2
Wendt, H.R.3
-
2
-
-
0028422667
-
Development of Ammonia Adsorption Filter and Its Applications to LSI Manufacturing Environment
-
No. 5A
-
Saiki A, Oshio R, Suzuki M, et al., "Development of Ammonia Adsorption Filter and Its Applications to LSI Manufacturing Environment," Japanese Journal of Applied Physics, 33(Part 1, No. 5A):2504-2508, 1994.
-
(1994)
Japanese Journal of Applied Physics
, vol.33
, Issue.1 PART
, pp. 2504-2508
-
-
Saiki, A.1
Oshio, R.2
Suzuki, M.3
-
3
-
-
0029224104
-
Contamination Control for Processing DUV Chemically Amplified Photoresists
-
Bellingham, WA, SPIE
-
Vigil JC, Barrick MW, and Grafe TH, "Contamination Control for Processing DUV Chemically Amplified Photoresists," in Proceedings of SPIE's International Symposium of Microlithography, Bellingham, WA, SPIE, p 210, 1995.
-
(1995)
Proceedings of SPIE's International Symposium of Microlithography
, pp. 210
-
-
Vigil, J.C.1
Barrick, M.W.2
Grafe, T.H.3
-
4
-
-
84953674473
-
Boron Contamination of Surfaces in Silicon Microelectronics Processing: Characteristics and Causes
-
Stevie FA, Martin EP Jr., Kahora PM, et al., "Boron Contamination of Surfaces in Silicon Microelectronics Processing: Characteristics and Causes," Journal of Vacuum Science and Technology A, 9(5):2813, 1991.
-
(1991)
Journal of Vacuum Science and Technology A
, vol.9
, Issue.5
, pp. 2813
-
-
Stevie, F.A.1
Martin Jr., E.P.2
Kahora, P.M.3
-
5
-
-
3142696375
-
Study on Boron Contamination in Clean Room
-
Yokohama, Japan, The International Confederation of Contamination Control Societies
-
Inoue M, Noga T, Togawa M, et al., "Study on Boron Contamination in Clean Room," in Proceedings of 12th International Symposium on Contamination Control, Yokohama, Japan, The International Confederation of Contamination Control Societies, pp 111-116, 1994.
-
(1994)
Proceedings of 12th International Symposium on Contamination Control
, pp. 111-116
-
-
Inoue, M.1
Noga, T.2
Togawa, M.3
-
6
-
-
0026944802
-
Correlating Organophosphorus Contamination of Wafer Surfaces with HEPA-Filter Installation
-
Mori EJ, Dowdy JD, and Shive LW, "Correlating Organophosphorus Contamination of Wafer Surfaces with HEPA-Filter Installation," Microcontamination, 10(10):35-37, 56, 1992.
-
(1992)
Microcontamination
, vol.10
, Issue.10
, pp. 35-37
-
-
Mori, E.J.1
Dowdy, J.D.2
Shive, L.W.3
-
7
-
-
0346768291
-
Outgassing: Advanced Detection and Control Techniques
-
Simonson RJ, Thornberg SM, and Liang AY, "Outgassing: Advanced Detection and Control Techniques," CleanRooms, 9(2):23-31, 1995.
-
(1995)
CleanRooms
, vol.9
, Issue.2
, pp. 23-31
-
-
Simonson, R.J.1
Thornberg, S.M.2
Liang, A.Y.3
-
8
-
-
0025844672
-
Gate Oxide Deterioration Caused by Organic Contamination onto the Oxide
-
Yokohama, Japan
-
Hashimoto K, Egashira K, Suzuki M, et al., "Gate Oxide Deterioration Caused by Organic Contamination onto the Oxide," in Proceedings of 23rd International Conference on Solid State Devices and Materials, Yokohama, Japan, pp 243-245, 1991.
-
(1991)
Proceedings of 23rd International Conference on Solid State Devices and Materials
, pp. 243-245
-
-
Hashimoto, K.1
Egashira, K.2
Suzuki, M.3
-
9
-
-
0025521471
-
Pleated DPCC-Based Adsorbers: New Technology for Air Purification
-
Kinkead D, "Pleated DPCC-Based Adsorbers: New Technology for Air Purification," ASHRAE Journal, 32(10):35-40, 1990.
-
(1990)
ASHRAE Journal
, vol.32
, Issue.10
, pp. 35-40
-
-
Kinkead, D.1
-
10
-
-
0029532485
-
Ion-Exchange Chemical Filter for Ultra Clean Environment
-
Mount Prospect, IL, Institute of Environmental Sciences
-
Kawazu H, "Ion-Exchange Chemical Filter for Ultra Clean Environment," in Proceedings of 41st Annual Technical Meeting, Mount Prospect, IL, Institute of Environmental Sciences, pp 246-253, 1995.
-
(1995)
Proceedings of 41st Annual Technical Meeting
, pp. 246-253
-
-
Kawazu, H.1
-
11
-
-
0029255586
-
Achieving Your Indoor Air Quality Goals: Which Filtration System Works Best?
-
Muller CO, and England WG, "Achieving Your Indoor Air Quality Goals: Which Filtration System Works Best?," ASHRAE Journal, 37(2):24-32, 1995.
-
(1995)
ASHRAE Journal
, vol.37
, Issue.2
, pp. 24-32
-
-
Muller, C.O.1
England, W.G.2
-
12
-
-
0028699921
-
Evaluation of Test Methods for Determining the Effectiveness and Capacity of Gas Phase Air Filtration Equipment for Indoor Air Application. Phase I: Literature Review and Test Recommendations
-
VanOsdell DW, "Evaluation of Test Methods for Determining the Effectiveness and Capacity of Gas Phase Air Filtration Equipment for Indoor Air Application. Phase I: Literature Review and Test Recommendations," ASHRAE Transactions, 100(Part2), 1994.
-
(1994)
ASHRAE Transactions
, vol.100
, Issue.2 PART
-
-
VanOsdell, D.W.1
-
14
-
-
0017103735
-
Respirator Cartridge Efficiency Studies: VIII. Summary and Conclusions
-
Nelson GO, and Correia AN, "Respirator Cartridge Efficiency Studies: VIII. Summary and Conclusions," American Industrial Hygiene Association Journal, 37(September):514-525, 1976.
-
(1976)
American Industrial Hygiene Association Journal
, vol.37
, Issue.SEPTEMBER
, pp. 514-525
-
-
Nelson, G.O.1
Correia, A.N.2
-
15
-
-
0003987898
-
-
Englewood Cliffs, NJ, P T R Prentice-Hall
-
Cheremisinoff NP, and Cheremisinoff PN, Carbon Adsorption for Pollution Control, Englewood Cliffs, NJ, P T R Prentice-Hall, p 216, 1993.
-
(1993)
Carbon Adsorption for Pollution Control
, pp. 216
-
-
Cheremisinoff, N.P.1
Cheremisinoff, P.N.2
-
16
-
-
0005034720
-
Packed-Bed vs. Carbon-Impregnated Fiber Gas-Phase Air Filters for the Maintenance of Acceptable IAQ
-
Atlanta, ASHRAE
-
Muller CO, "Packed-Bed vs. Carbon-Impregnated Fiber Gas-Phase Air Filters for the Maintenance of Acceptable IAQ," in Proceedings of IAQ '93, Atlanta, ASHRAE, 1993.
-
(1993)
Proceedings of IAQ '93
-
-
Muller, C.O.1
-
17
-
-
19844373309
-
Testing to Investigate the Performance and Characteristics of Chemical Filters
-
Yokohama, Japan, The International Confederation of Contamination Control Societies
-
Kubo K, "Testing to Investigate the Performance and Characteristics of Chemical Filters," in Proceedings of 12th International Symposium on Contamination Control, Yokohama, Japan, The International Confederation of Contamination Control Societies, pp 143-147, 1994.
-
(1994)
Proceedings of 12th International Symposium on Contamination Control
, pp. 143-147
-
-
Kubo, K.1
-
18
-
-
0027635420
-
Testing of Chemically Treated Adsorbent Air Purifiers
-
Kelly TJ, and Kinkead DA, "Testing of Chemically Treated Adsorbent Air Purifiers," ASHRAE Journal, 35(7):14-23, 1993.
-
(1993)
ASHRAE Journal
, vol.35
, Issue.7
, pp. 14-23
-
-
Kelly, T.J.1
Kinkead, D.A.2
-
19
-
-
0010221475
-
Testing a Chemically Reactive Filter for the Removal of Trace Hydrogen Sulfide Gas
-
Hashimoto M, Ichimuro S, and Ide M, "Testing a Chemically Reactive Filter for the Removal of Trace Hydrogen Sulfide Gas," Microcontamination, 12(3):47-53, 1994.
-
(1994)
Microcontamination
, vol.12
, Issue.3
, pp. 47-53
-
-
Hashimoto, M.1
Ichimuro, S.2
Ide, M.3
-
20
-
-
0028699189
-
Ozone-Removal Efficiencies of Activated Carbon after More than Three Years of Continuous Service
-
Atlanta, ASHRAE
-
Weschler CJ, Shields HC, and Naik DV, "Ozone-Removal Efficiencies of Activated Carbon after More than Three Years of Continuous Service," ASHRAE Transactions: Symposia, Atlanta, ASHRAE, PP 1121-1129, 1994.
-
(1994)
ASHRAE Transactions: Symposia
, pp. 1121-1129
-
-
Weschler, C.J.1
Shields, H.C.2
Naik, D.V.3
-
21
-
-
38349053613
-
An Evaluation of Activated Carbon Filters for the Control of Ozone, Sulfur Dioxide, and Selected Volatile Organic Compounds
-
Atlanta, ASHRAE
-
Weschler CJ, Shields HC, and Naik DV, "An Evaluation of Activated Carbon Filters for the Control of Ozone, Sulfur Dioxide, and Selected Volatile Organic Compounds," in Proceedings of IAQ '92: Environments for People, Atlanta, ASHRAE, pp 233-240, 1992.
-
(1992)
Proceedings of IAQ '92: Environments for People
, pp. 233-240
-
-
Weschler, C.J.1
Shields, H.C.2
Naik, D.V.3
-
23
-
-
0017280460
-
Respirator Cartridge Efficiency Studies: VI. Effect of Concentration
-
Nelson GO, and Harder CA, "Respirator Cartridge Efficiency Studies: VI. Effect of Concentration," American Industrial Hygiene Association Journal, 37(April): 205-216, 1976.
-
(1976)
American Industrial Hygiene Association Journal
, vol.37
, Issue.APRIL
, pp. 205-216
-
-
Nelson, G.O.1
Harder, C.A.2
-
24
-
-
0029253996
-
Carbon Adsorption for Indoor Air Quality Cleaning
-
VanOsdell DW, and Sparks LE, "Carbon Adsorption for Indoor Air Quality Cleaning," ASHRAE Journal, 37(2):34-40, 1995.
-
(1995)
ASHRAE Journal
, vol.37
, Issue.2
, pp. 34-40
-
-
VanOsdell, D.W.1
Sparks, L.E.2
-
25
-
-
0017080790
-
Respirator Cartridge Efficiency Studies: VII. Effect of Relative Humidity and Temperature
-
Nelson GO, Correia AN, and Harder CA, "Respirator Cartridge Efficiency Studies: VII. Effect of Relative Humidity and Temperature," American Industrial Hygiene Association Journal, 37(September):280-292, 1976.
-
(1976)
American Industrial Hygiene Association Journal
, vol.37
, Issue.SEPTEMBER
, pp. 280-292
-
-
Nelson, G.O.1
Correia, A.N.2
Harder, C.A.3
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