Spatial investigation of a large diameter microwave plasma

Journal of Physics D: Applied Physics

Volumn 28, Issue 7, 1995, Pages 1529-1533

  Bluem, E ^a   Bechu S ^a   Boisse Laporte, C ^a   Leprince, P ^a   Maree J ^a  

^a UNIVERSITÉ PARIS SUD   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0005012712     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/28/7/035     Document Type: Article

References (8)

1. Harrington R F Hill Time-harmonic Electromagnetic Fields (New York: McGraw-Hill)
2. Ferreira C M and Moisan M (eds) 1993 Microwave Discharges Fundamentals and Applications vol 302 (New York: Plenum)
3. Moisan M and Zakrzewski Z 1991 Plasma sources based on the propagation of electromagnetic surface waves J. Phys. D: Appl. Phys. 24 1025
4. Hermann H 1935 Z Phys. 97 539
5. Bluem E, Bechu S, Henda K, Boisse-Laporte C, Leprince P and Maree J 1994 Surface waves in a large diameter microwave plasma Proc. ESC AM PIG (The Netherlands) August 1994
6. Granier A, Chéreau D, Henda K, Safari R and Leprince P 1994 Validity of actinometry to monitor oxygen atom concentration in microwaves discharges created by surface wave in 02-N2 mixtures J. Appl. Phys. 75 104-14
7. Boisse-Laporte C, Granier A, Bloyet E, Leprince P and Maree J 1987 Influence of the excitation frequency on surface wave argon discharges study of the light emission J. Appl. Phys. 61 1740-6
8. Bluem E 1995 Caractérization d’une décharge microonde de grand diamètre Thèse Université Paris-Sud, Orsay