Epi-less bond-and-etch-back silicon-on-insulator by MeV ion implantation

Applied Physics Letters

Volumn 58, Issue 24, 1991, Pages 2779-2781

  Maszara, W P ^a   Pronko, P P ^b   McCormick, A W ^b  

^a AlliedSignal Aerospace Inc

^b Universal Energy Systems Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0004994299     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.104784     Document Type: Article

References (6)