In situ stress measurements of Co/Pd multilayer films using an optical non-contact displacement detector

Thin Solid Films

Volumn 258, Issue 1-2, 1995, Pages 128-131

  Kim, Young Suk ^a   Shin, Sung Chul ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Cobalt; Multilayers; Sputtering; Stress

Indexed keywords

EID: 0004986644     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(94)06380-X     Document Type: Article

References (8)

1. An Apparatus for Measuring Stress in Thin Films
2. The measurement of magnetostriction in ferromagnetic thin films
3. The Tension of Metallic Films Deposited by Electrolysis
4. Magnetic anisotropy of multilayers