Rapid thermal processing for ULSI applications: An overview

Solid State Technology

Volumn 39, Issue 2, 1996, Pages 63-74

  Reid, Kimberly G ^a,b,c   Sitaram, A R ^a,c,d  

^a MOTOROLA INC   (United States)

^b NORTH CAROLINA STATE UNIVERSITY   (United States)

^c MOTOROLA INC   (United States)

^d NATIONAL INSTITUTE OF TECHNOLOGY KARNATAKA   (India)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0004953118     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (19)

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