-
1
-
-
0004093537
-
-
American Chemical Society, Washington, DC
-
Thompson, L. F., Willson, C. G. and Bowden, M. J., Introduction to Microlithography, 2nd edn. American Chemical Society, Washington, DC, 1994.
-
(1994)
Introduction to Microlithography, 2nd Edn.
-
-
Thompson, L.F.1
Willson, C.G.2
Bowden, M.J.3
-
3
-
-
0023548444
-
-
Stillwagon, L. E., Vasile, M. J., Baiocchi, F. A., Silverman, P. J. and Taylor, G. N. Microelectron. Eng. 1987, 6, 381.
-
(1987)
Microelectron. Eng.
, vol.6
, pp. 381
-
-
Stillwagon, L.E.1
Vasile, M.J.2
Baiocchi, F.A.3
Silverman, P.J.4
Taylor, G.N.5
-
4
-
-
0024664242
-
-
Taylor, G. N., Nalamasu, O. and Stillwagon, L. E., Microelectron. Eng. 1989, 9, 513.
-
(1989)
Microelectron. Eng.
, vol.9
, pp. 513
-
-
Taylor, G.N.1
Nalamasu, O.2
Stillwagon, L.E.3
-
6
-
-
0026116525
-
-
Abali, L. N., Bobbio, S. M., Bohland, J. F., Calabrese, G. S., Gulla, M., Pavelcheck, E. K. and Sricharoenchaikit, P., Microelectron. Eng. 1991, 13, 93.
-
(1991)
Microelectron. Eng.
, vol.13
, pp. 93
-
-
Abali, L.N.1
Bobbio, S.M.2
Bohland, J.F.3
Calabrese, G.S.4
Gulla, M.5
Pavelcheck, E.K.6
Sricharoenchaikit, P.7
-
7
-
-
0026240552
-
-
Calvert, J. M., Duicey, C. S., Peckera, M. C., Schnur, J. M., Geoger, Jr. J. H., Calabrese G. S. and Sricharoenchaikit, P., Solid State Technol. 1991, 34, 77.
-
(1991)
Solid State Technol.
, vol.34
, pp. 77
-
-
Calvert, J.M.1
Duicey, C.S.2
Peckera, M.C.3
Schnur, J.M.4
Geoger J.H., Jr.5
Calabrese, G.S.6
Sricharoenchaikit, P.7
-
8
-
-
0027113250
-
-
Shirai, M., Hayashi, M. and Tsunooka, T., Macromolecules 1992, 25, 195.
-
(1992)
Macromolecules
, vol.25
, pp. 195
-
-
Shirai, M.1
Hayashi, M.2
Tsunooka, T.3
-
9
-
-
0001881634
-
-
Shirai, M., Kinoshita, T., Sumino, T., Miwa, T. and Tsunooka, M., Chem. Mater. 1993, 5, 98.
-
(1993)
Chem. Mater.
, vol.5
, pp. 98
-
-
Shirai, M.1
Kinoshita, T.2
Sumino, T.3
Miwa, T.4
Tsunooka, M.5
-
10
-
-
0027608193
-
-
Shirai, M., Sumino, T. and Tsunooka, M., Eur. Polym. J. 1993, 29, 831.
-
(1993)
Eur. Polym. J.
, vol.29
, pp. 831
-
-
Shirai, M.1
Sumino, T.2
Tsunooka, M.3
-
11
-
-
0002520301
-
-
Shirai, M., Masuda, T., Ishida, H. and Tsunooka, M., Eur. Polym. J. 1985, 21, 781.
-
(1985)
Eur. Polym. J.
, vol.21
, pp. 781
-
-
Shirai, M.1
Masuda, T.2
Ishida, H.3
Tsunooka, M.4
-
12
-
-
0019299523
-
-
Smets, G., Aerts, A. and Erum, J. V., Polym. J. 1980, 12, 539.
-
(1980)
Polym. J.
, vol.12
, pp. 539
-
-
Smets, G.1
Aerts, A.2
Erum, J.V.3
-
13
-
-
0039358785
-
-
Shirai, M., Masuda, T., Tsunooka, M. and Tanaka, M., Makromol. Chem. Rapid. Commun. 1984, 5, 689.
-
(1984)
Makromol. Chem. Rapid. Commun.
, vol.5
, pp. 689
-
-
Shirai, M.1
Masuda, T.2
Tsunooka, M.3
Tanaka, M.4
-
14
-
-
0022678208
-
-
Shirai, M., Wakinaka, S., Ishida, H., Tsunooka, M. and Tanaka, M., J. Polym. Sci.: Part C: Polym. Lett. 1986, 24, 119.
-
(1986)
J. Polym. Sci.: Part C: Polym. Lett.
, vol.24
, pp. 119
-
-
Shirai, M.1
Wakinaka, S.2
Ishida, H.3
Tsunooka, M.4
Tanaka, M.5
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