Ecologically-safe ionized water treatment for wafer processing

Digest of Technical Papers - Symposium on VLSI Technology

Volumn , Issue , 1993, Pages 107-108

  Aoki, Hidemitsu ^a   Nakamori, Masaharu ^a   Aoto, Nahomi ^a   Ikawa, Eiji ^a  

^a NEC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0004844834     PISSN: 07431562     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/VLSIT.1993.760268     Document Type: Conference Paper

References (0)