Relaxation of the step profile for different microscopic mechanisms

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 4, 1996, Pages 2799-2808

  Liu, Da Jiang ^a   Elain S , Fu ^a   Johnson, M D ^a   Weeks, John D ^a   Williams, Ellen D ^a  

^a Bldg 142   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0004767886     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588836     Document Type: Article

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