Evaluation of thin film surface topology shapes

Mathematics and Computers in Simulation

Volumn 49, Issue 4-5, 1999, Pages 275-283

  Vutova, K ^a   Mladenov, G ^a   Tanaka, T ^b   Kawabata, K ^b  

^a BULGARIAN ACADEMY OF SCIENCES   (Bulgaria)

^b HIROSHIMA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

3D mathematical model; Shadowing effect; Textured sample surface; X ray photoelectron spectra (XPS); XPS angular intensity distribution

Indexed keywords

EID: 0004735406     PISSN: 03784754     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0378-4754(99)00044-0     Document Type: Article

References (4)

1. D.R. Penn, J. Electron Spectr. Rel. Phenomena 9 (1976) 29.
2. G. Mladenov, K. Vutova, T. Tanaka, K. Kawabata, XPS photoelectron profilography, Journal of Surface Analysis, V.S. No. 1, (1999) 82-85.
3. K. Kawabata, Y. Shiratsuki, T. Hayashi, K. Yamada, S. Miyazaki, M. Hirose, Jpn. J. Appl. Phys. 30(7B) (1991) 1231.
4. L. Bernardezet al., Surf. Sci. 139 (1984) 541.