Characterisation of micromachined surfaces by atomic force microscopy

Industrial Diamond Review

Volumn 56, Issue 569, 1996, Pages 59-63

  Brinksmeier, E ^a   Hoper R ^a   Riemer, O ^a  

^a UNIVERSITY OF BREMEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0004664694     PISSN: 00198145     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (13)

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2. E. Brinksmeier. Herstellung von Präzisionsbauteilen durch Mikrozerspanung (Manufacture of precision components by micromachining). Industrie Diamanten Rundschau 4/94, pp 210-217.
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5. Silicon Calibration Sample #1 from Nanoprobe Corp.
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10. E. Brinksmeier, W. Preuß, O. Riemer, M. Schroeder. Manufacturing and measurement of elliptical mirrors for focusing synchrotron radiation. Proc 8th IPES, Compiegne, France, May 1995, Elsevier, 1995, pp 459-462.
11. E. Brinksmeier, W. Preuß, O. Riemer, R. Sigel. Manufacture of shock-wave target foils for nuclear fusion research. Proc. 3rd International Conference on Ultra Precision in Manufacturing Engineering. Published by: M. Weck, H. Kunzmann, Verlag Franz Rhiem, Duisburg, 1994, pp 401-404.
12. E. Brinksmeier, W. Preuß, O. Riemer. From friction to chip removal. An experimental investigation of the microcutting process. Part I. Proc. 3rd International Conference on Ultra Precision in Manufacturing Engineering. Published by: M. Week, H. Kunzmann, Verlag Franz Rhiem, Duisburg, 1994, pp 393-400.
13. E. Brinksmeier, W. Preuß, O. Riemer. From friction to chip removal. An experimental investigation of the microcutting process. Part II. Proc 8th IPES, Compiegne, France, May 1995, Elsevier, 1995, pp 335-338.