Magnetically enhanced electromagnetic wave penetration in weakly ionized plasmas

Plasma Sources Science and Technology

Volumn 3, Issue 1, 1994, Pages 99-107

  Bozeman, S P ^a   Hooke, W M ^a  

^a UNIVERSITY OF NORTH CAROLINA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0004639080     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/3/1/012     Document Type: Article

References (16)

1. Plasma uniformity and power deposition in electron cyclotron resonance etch tools