Optimization and control of grating coupling to or from a silicon-based optical waveguide

Optical Engineering

Volumn 35, Issue 11, 1996, Pages 3092-3100

  Sychugov, Vladimir A ^a   Tishchenko, Alexander V ^a   Usievich, Boris A ^a   Parriaux, Olivier ^b  

^a PROKHOROV GENERAL PHYSICS INSTITUTE   (Russian Federation)

^b FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

Author keywords

Grating coupler; High coupling efficiency; Radiation loss; Silicon substrate; TE mode; TM modes

Indexed keywords

EID: 0004633687     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.601048     Document Type: Article

References (18)

1. S. Nishiwaki, J.-I. Asada, and S. Uchida, "Optical head employing a concentric-circular focusing grating coupler," Appl. Opt. 33(10), 1819-1827 (1994).
2. O. Parriaux, "Integrated optic displacement interferometers and flat optical antennae," Techn. Mess. 58(4), 158-164 (1991).
3. C. Fattinger, M. T. Gale, B. J. Curtis, H. Schütz, M. Heming, and J. Otto, "The bidiffractive grating coupler: a universal platform for optical surface probing," in Proc. ECIO'93, pp. 4-12, Neuchâtel, Switzerland (Apr. 1993).
4. K. C. Chang and T. Tamir, "Simplified approach to surface-wave scattering by blazed dielectric gratings," Appl. Opt. 19, 282-288 (1980).
5. T. Aoyagi, Y. Aoyagi, and S. Namba, "High-efficiency blazed grating couplers," Appl. Phys. Lett. 29, 303-304 (1976).
6. R. Waldhäusl, P. Dannberg, E. B. Kley, A. Bräuer, and W. Karthe, "Asymmetric triangular (blazed) grating couplers in planar polymer waveguides," in Proc. ECIO'93, pp. 4-14, Neuchâtel, Switzerland (Apr. 1993).
7. I. A. Avrutsky, A. S. Svakhin, V. A. Sychugov, and O. Parriaux, "High efficiency single order waveguide grating coupler," Opt. Lett. 15, 1446-1448 (1990).
8. T. Suhara, S. Ura, H. Nishihara, and J. Koyama, "An integrated-optic disc pickup device," in Proc. IOOC'85 pp. 117-120, Venezia, Italy (Oct. 1985).
9. Y. Yamamoto, T. Kamiya, and H. Yanai, "Improved coupled mode analysis of corrugated waveguides and lasers," IEEE J. Quantum Electron. QE-14, 245-258 (1978).
10. R. M. Emmons and D. G. Hall, "Buried-oxide silicon-on-insulator structures II: waveguide grating couplers," IEEE J. Quantum Electron. QE-28, 164-175 (1992).
11. I. A. Avrutsky, V. A. Sychugov, and A. V. Tishchenko, "The study of excitation, radiation and reflection processes in corrugated waveguides," Proc. IOFAN 34, 3-25 (1991).
12. A. A. Zlenko, V. A. Kiselev, A. M. Prokhorov, A. A. Spikhl'skii, and V. A. Sychugov, "Emission of surface light waves from a corrugated part of a thin-film waveguide," Sov. J. Quantum Electron. 4(7), 839-842 (1975).
13. O. Parriaux and P. Dierauer, "Normalized expressions for the optical sensitivity of evanescent wave sensors," Opt. Lett. 19(7), 508-510 (1994).
14. T. Baba and Y. Kokubun, "High efficiency light coupling from anti-resonant reflecting optical waveguide to integrated photodetector using an antireflecting layer," Appl. Opt. 29, 2781-2792 (1990).
15. B. A. Ataya and A. N. Osovitskii, "Emission properties of graded-index corrugated waveguides with a metal or semiconductor coating," Sov. J. Quantum Electron. 22, 188-192 (1992).
16. V. A. Kiselev, "Diffraction coupling of radiation into a thin-film waveguide," Sov. J. Quantum Electron. 4, 872-875 (1975).
17. J. W. Parker, "Optical interconnection for advanced processor systems: a review of the ESPRIT II OLIVES programme," J. Lightwave Technol. 9(12), 1764-1773 (1991).
18. A. Yi-Yan, W. K. Chan, T. J. Gmitter, and M. Seto, "Semiconductor-grafted integrated optics," in Proc. Integrated Photonics Research, p. 39, OSA (1990).