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Volumn 6, Issue 13, 2000, Pages 257-261

Delivery of F2-excimer laser light by aluminum hollow fibers

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; CRYSTALLINE MATERIALS; EXCIMER LASERS; FIBER OPTICS; INERT GASES; LASER BEAMS; OPTICAL FIBERS; OPTICAL SYSTEMS; SURFACE ROUGHNESS; THIN FILMS;

EID: 0004610280     PISSN: 10944087     EISSN: None     Source Type: Journal    
DOI: 10.1364/OE.6.000257     Document Type: Article
Times cited : (10)

References (11)
  • 3
    • 0004121646 scopus 로고
    • Applications of excimer lasers
    • H. Nagai, "Applications of excimer lasers," Rev. Laser Eng. 23, 1038-1050 (1995).
    • (1995) Rev. Laser Eng. , vol.23 , pp. 1038-1050
    • Nagai, H.1
  • 4
    • 0002951691 scopus 로고    scopus 로고
    • Processing applications with the 157-nm fluorine excimer laser
    • Excimer Lasers, Optics, and Applications, H Shields and P E Dyer, eds.
    • P. R. Herman, K. Beckley, B. Jackson, K. Kurosawa, D. Moore, T. Yamanishi, and J. Yang, "Processing applications with the 157-nm fluorine excimer laser," in Excimer Lasers, Optics, and Applications, H Shields and P E Dyer, eds., Proc. SPIE 2992, 86-95 (1997).
    • (1997) Proc. SPIE , vol.2992 , pp. 86-95
    • Herman, P.R.1    Beckley, K.2    Jackson, B.3    Kurosawa, K.4    Moore, D.5    Yamanishi, T.6    Yang, J.7
  • 5
    • 0000477324 scopus 로고    scopus 로고
    • 2 excimer laser optics: Fluorine content and color-center formation
    • 2 excimer laser optics: fluorine content and color-center formation," Opt. Lett. 24, 1549-1551 (1999).
    • (1999) Opt. Lett. , vol.24 , pp. 1549-1551
    • Hosono, H.1    Mizuguchi, M.2    Skuja, L.3    Ogawa, T.4
  • 7
    • 0001107758 scopus 로고
    • Dependence of the damage and transmission properties of fused silica fibers on the excimer laser wavelength
    • R. S. Taylor, K. E. Leopold, R. K. Brimacombe and S. Mihailov, "Dependence of the damage and transmission properties of fused silica fibers on the excimer laser wavelength," Appl. Opt. 27, 3124-3134 (1988).
    • (1988) Appl. Opt. , vol.27 , pp. 3124-3134
    • Taylor, R.S.1    Leopold, K.E.2    Brimacombe, R.K.3    Mihailov, S.4
  • 8
    • 0032133562 scopus 로고    scopus 로고
    • Flexible hollow waveguides for delivery of excimer-laser light
    • Y. Matsuura and M. Miyagi, "Flexible hollow waveguides for delivery of excimer-laser light," Opt. Lett. 23, 1226-1228 (1998).
    • (1998) Opt. Lett. , vol.23 , pp. 1226-1228
    • Matsuura, Y.1    Miyagi, M.2
  • 9
    • 0032607094 scopus 로고    scopus 로고
    • Aluminum-coated hollow glass fibers for ArF-excimer laser light fabricated by metallorganic chemical-vapor deposition
    • Y. Matsuura and M. Miyagi, "Aluminum-coated hollow glass fibers for ArF-excimer laser light fabricated by metallorganic chemical-vapor deposition," Appl. Opt. 38, 2458-2462 (1999).
    • (1999) Appl. Opt. , vol.38 , pp. 2458-2462
    • Matsuura, Y.1    Miyagi, M.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.