Amorphous carbon film deposition using a DC-biased screen-grid in an electron cyclotron resonance plasma

Vacuum

Volumn 51, Issue 3, 1998, Pages 445-451

  Yoon, S F ^a   Rusli, ^a   Ahn, J ^a   Zhang, Q ^a   Wu, Y S ^a   Yang, H ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0004575107     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(98)00192-4     Document Type: Article

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