New method for testing hermeticity of silicon sensor structures

Sensors and Actuators, A: Physical

Volumn 53, Issue 1-3, 1996, Pages 349-352

  Nese, Martin ^a,b   Bernstein, Ralph W ^a   Johansen, Ib Rune ^a   Spooren, Rudie ^a  

^a SINTEF   (Norway)

^b Central Institute for Industrial Research   (Norway)

Author keywords

Hermeticity; Silicon sensors

Indexed keywords

EID: 0004559992     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(96)80159-2     Document Type: Article

References (10)

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