Ultracompact Multimode Interference 3-dB Coupler with Strong Lateral Confinement by Deep Dry Etching

IEEE Photonics Technology Letters

Volumn 12, Issue 5, 2000, Pages 492-494

  Ma, Yong ^a   Park, Seoijin ^a   Wang, Liwei ^a   Ho, Seng Tiong ^a  

^a Northwestern University   (United States)

Author keywords

3 dB coupler; Deep dry etching; Excess loss; Imbalance; InP InGaAsP; Multimode interference; Splitting ratio

Indexed keywords

EID: 0004548136     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/68.841263     Document Type: Article

References (8)

1. J. M. Heaton, R. M. Jenikins, D. R. Wight, J. T. Parker, J. C. H. Birbeck, and K. P. Hilton, "Novel 1-to-N way integrated optical beam splitters using symmetric mode mixing in GaAs/AlGaAs multimode waveguides," Appl. Phys. Lett., vol. 61, pp. 1754-1756, 1992.
2. L. H. Spiekman, Y. S. Oei, E. G. Metaal, F. H. Groen, I. Moerman, and M. K. Smit, "Extremely small multimode Interference couplers and ultrshort bends on InP by deep etching," IEEE Photon. Technol. Lett., vol. 6, pp. 1008-1010, 1994.
3. M. R. Paiam, C. F. Janz, R. I. MacDonald, and J. N. Broughton, "Compact planar 980/1550-nm wavelength multi/demultiplexer based on multimode interference," IEEE Photon. Technol. Lett., vol. 7, pp. 1180-1182, 1995.
4. D. S. Levy, R. Scarmozzino, Y. M. Li, and R. M. Osgood, Jr., "A new design for ultracompact multimode interference-based 2 x 2 couplers," IEEE Photon. Technol. Lett., vol. 10, pp. 96-98, 1998.
5. D. S. Levy, K. H. Park, R. Scarmozzino, R. M. Osgood, Jr., C. Dries, P. Studenkov, and S. Forrest, "Fabrication of ultracompact 3-dB 2 x 2 MMI power splitters," IEEE Photon. Technol. Lett., vol. 11, pp. 1009-1011, 1999.
6. L. B. Soldano and E. C. M. Pennings, "Optical multimode interference devices based on self-imaging: Principles and applications," J. Lighwave Technol., vol. 13, pp. 615-627, 1995.
7. R. Ulrich and T. Kamiya, "Resolution of self-images in planar optical waveguides," J. Opt. Soc. Amer., vol. 68, pp. 583-592, 1978.
8. P. A. Besse, M. Bachmann, H. Melchior, L. B. Soldano, and M. K. Smit, "Optical bandwidth and fabrication tolerance of multimode interference couplers," J. Lightwave Technol., vol. 12, pp. 1004-1009, 1994.