Refractive and diffractive elements for micro-optical systems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3226, Issue , 1997, Pages 32-43

  Nussbaum, Ph ^a   Herzig, H P ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

Characterization; Microfabrication; Microsystems; Refractive and diffractive micro optical elements

Indexed keywords

BLOOD; FABRICATION; MEMS; MICROANALYSIS; MICROELECTROMECHANICAL DEVICES; MICROELECTRONIC PROCESSING; MICROFABRICATION; MICROMACHINING; MICROSYSTEMS; ORGANIC POLYMERS; OXIDE MINERALS; POLYMERIC GLASS; QUARTZ; REACTIVE ION ETCHING;

BLOOD GASSES; DIFFRACTIVE ELEMENTS; DIRECT WRITINGS; ELECTRONIC COMPONENTS; FABRICATION TECHNIQUES; HIGH RESOLUTIONS; LASER BEAM SHAPING; MASK PROJECTIONS; REACTIVE IONS; REFRACTIVE AND DIFFRACTIVE MICRO-OPTICAL ELEMENTS; REPLICATION TECHNIQUES; SPACE COMMUNICATIONS; SURFACE PROFILES;

OPTICAL DEVICES;

EID: 0004544542     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.284572     Document Type: Conference Paper

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