New observations on pyramidal hillocks in the anisotropic etching of <100> silicon

Sensors and Materials

Volumn 8, Issue 7, 1996, Pages 423-429

  Bhatnagar, Yashraj K ^a,b   Nathan, Arokia ^a   Lu, Yong ^a  

^a UNIVERSITY OF WATERLOO   (Canada)

^b APPLIED MATERIALS INC   (United States)

Author keywords

Anisotropic etching; Pyramidal hillocks

Indexed keywords

EID: 0004471441     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (6)

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