Determination of grain size in indium tin oxide films from transmission measurements

Applied Optics

Volumn 35, Issue 25, 1996, Pages 5048-5051

  Lehan, J P ^a  

^a BOC Coating Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0004446633     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.35.005048     Document Type: Article

References (11)

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3. H. E. Bennett and J. O. Porteus, “Relation between surface roughness and specular reflectance at normal incidence, ” J. Opt. Soc. Am. 51, 123-129 (1961).
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7. C. K. Carniglia, “A simple dispersion equation for dielectric and semiconductor materials, ” in Society of Vacuum Coaters Thirty-Eighth Annual Technical Conference Proceedings (Society of Vacuum Coaters, Albuquerque, N.M., 1995), pp. 176-181.
8. I. Hamberg, “Indium-tin-oxide thin films: basic optical prop erties and applications of energy efficient windows, ” Ph.D. dissertation (Chalmers University of Technology, Chalmers, Sweden, 1984).
9. D. Bhattacharyya, S. Chaudhuri, and A. K. Pal, “Alternative route for studying the grain boundary scattering in semiconductor films of high resistivity, ” Vacuum 44, 797-801 (1993).
10. D. Bhattacharyya, S. Chaudhuri, and A. K. Pal, “Bandgap and optical transitions in thin films from reflectance measurements, ” Vacuum 43, 313-316 (1992).
11. J. A. Thornton, “Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered films, ” J. Vac. Sci. Technol. 11, 666-670 (1974).