UV irradiation effects in Al chemical vapor deposition on titanium nitride

Applied Physics Letters

Volumn 69, Issue 3, 1996, Pages 340-342

  Nitta, Toshinari ^a   Hanabusa, Mitsugu ^a  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0004362585     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.118053     Document Type: Article

References (16)

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