Correlation between contact-electrified charge groups on a thin silicon oxide

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 2, 1996, Pages 1055-1059

  Uchihashi, Takayuki ^a   Okusako, Takahiro ^a   Sugawara, Yasuhiro ^a   Yamanishi, Yoshiki ^b   Oasa, Takahiko ^b   Morita, Seizo ^a  

^a HIROSHIMA UNIVERSITY   (Japan)

^b Sumitomo Metal Industries Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0004361201     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588399     Document Type: Article

References (9)

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